Metrology
Coral Name Makesort icon Model contact location
ambios Ambios XP200 zhao.lu@mcgill.ca Etch/Dep room
Probe Station EVERBEING EB-6 peng.yang2@mcgill.ca Assembly room
nanospec Nanospec --- Peng.Yang2@mcgill.ca; Etch/Dep room
olympusMX51 Olympus MX40 jun.li@mcgill.ca Etch/Dep room
sopra Sopra GES-5E peng.yang2@mcgill.ca Litho room
flexus Tencor Flexus 5200 jun.li@mcgill.ca Etch/Dep room
vega_sem Tescan VEGA3 XMH jun.li@mcgill.ca; Litho room
wyko Wyko NT8000 jun.li@mcgill.ca Litho room
Thin film deposition
Coral Name Makesort icon Model contact location
nexdep Angstrom Engineering Inc NexDep jun.li@mcgill.ca ;mcolisi.dlamini@mcgill.ca Etch/Dep room
dentone14 Denton Vacuum Explorer 14 zhao.lu@mcgill.ca Etch/Dep room
bjd1800 Temescal bjd1800 jun.li@mcgill.ca; mcolisi.dlamini@mcgill.ca Etch/Dep room
Dry Etching
Coral Name Makesort icon Model contact location
am5000-chA or am5000-chB or am5000-chC Applied Materials P5000 peng.yang2@mcgill.ca Etch/Dep room
dsb6000 Nanoplas DSB6000 peng.yang2@mcgill.ca; mcolisi.dlamini@mcgill.ca Etch/Dep room
ICP Plasma Therm APEX SLR(CL/F) peng.yang2@mcgill.ca Etch/Dep room
sde110 Tegal SDE110 jun.li@mcgill.ca; peng.yang2@mcgill.ca Etch/Dep room
xef2 Xactix e2 Peng.Yang2@mcgill.ca; Etch/Dep room
Chemical Vapor Deposition
Coral Name Makesort icon Model contact location
pecvd Applied Materials P5000 peng.yang2@mcgill.ca Etch/Dep room
gemstar8_ald Arradiance Inc. GEMStar-8™ Jun.li@mcgill.ca; zhao.lu@mcgill.ca Etch/Dep room
tylannitride or tylanpoly Tystar Tylan jun.li@mcgill.ca Etch/Dep room
Wet Etching
Coral Name Makesort icon Model contact location
n/a Crest Ultrasonics CP1100D zhao.lu@mcgill.ca; Etch/Dep room
wbgen-hf Reynold --- mcolisi.dlamini@mcgill.ca; zhao.lu@mcgill.ca Etch/Dep room
wbgen-nonhf SIC Bromont --- zhao.lu@mcgill.ca; mcolisi.dlamini@mcgill.ca Etch/Dep room
wbsolvent SIC Bromont --- mcolisi.dlamini@mcgill.ca; zhao.lu@mcgill.ca Etch/Dep room
lithosolv SIC Bromont --- mcolisi.dlamini@mcgill.ca; zhao.lu@mcgill.ca Litho room
wb-si-etch SIC Bromont --- mcolisi.dlamini@mcgill.ca; zhao.lu@mcgill.ca Etch/Dep room
Dicing Bonding and Packaging
Coral Name Makesort icon Model contact location
dad3240 Disco DAD3240 jun.li@mcgill.ca Assembly room
evg501 EVGroup 501 jun.li@mcgill.ca Litho room
wirebond WestBond 747677E jun.li@mcgill.ca Assembly room
Lithography
Coral Name Makesort icon Model contact location
n/a Electronic Micro Systems Ltd. 1000-1 jun.li@mcgill.ca; peng.yang2@mcgill.ca Litho room
evg620 EVGroup EVG620 jun.li@mcgill.ca; mcolisi.dlamini@mcgill.ca Litho room
evg101 EVGroup EVG101 jun.li@mcgill.ca Litho room
oven FisherScientist Isotemp jun.li@mcgill.ca;mcolisi.dlamini@mcgill.ca Litho room
n/a J.C. Nabity, Lithography Systems NPGS jun.li@mcgill.ca Wong Microscopy center
laurell Laurell WS-400-6NPP-LITE jun.li@mcgill.ca; mcolisi.dlamini@mcgill.ca Litho room
laurell-develop Laurell WS-1000MH/EDC-650-8B zhao.lu@mcgill.ca Litho room
oai200 Optical Associates Inc. 200 jun.li@mcgill.ca Litho room
sitecoat Site Service Spinball jun.li@mcgill.ca Litho room
nanofrazor SwissLitho Nanofrazor zhao.lu@mcgill.ca;mcolisi.dlamini@mcgill.ca Litho room
mira TESCAN MIRA3 XMH jun.li@mcgill.ca Wong Microscopy center
yes Yield Engineering Systems 310 jun.li@mcgill.ca; mcolisi.dlamini@mcgill.ca Litho room
Thermal Processes
Coral Name Makesort icon Model contact location
JetFirst200 Qualiflow Therm JetFirst 200 zhao.lu@mcgill.ca Etch/Dep room
tylanox Tystar Tytan jun.li@mcgill.ca Etch/Dep room
tylanox2 Tystar Tytan jun.li@mcgill.ca Etch/Dep room
Others
Coral Name Makesort icon Model contact location
Verteq Verteq 1800 peng.yang2@mcgill.ca Etch/Dep room