Dicing Bonding and Packaging
Coral Name Makesort icon Model contact location
polisher Allied --- Assembly room
dad3240 Disco DAD3240 John Li <jun.li@mcgill.ca> Assembly room
evg501 EVGroup 501 John Li <jun.li@mcgill.com> Litho room
wirebond WestBond 747677E John Li <jun.li@mcgill.ca> Assembly room
Metrology
Coral Name Makesort icon Model contact location
ambios Ambios XP200 zhao.lu@mcgill.ca Etch/Dep room
Probe Station EVERBEING EB-6 peng.yang2@mcgill.ca Assembly room
nanospec Nanospec --- Sasa Ristic <sasa.ristic@mcgill.ca> Etch/Dep room
olympusMX51 Olympus MX40 jun.li@mcgill.ca Etch/Dep room
sopra Sopra GES-5E Sasa Ristic <sasa.ristic@mcgill.ca> Litho room
flexus Tencor Flexus 5200 jun.li@mcgill.ca Etch/Dep room
vega_sem Tescan VEGA3 XMH John Li <jun.li@mcgill.ca>, Sasa Ristic <sasa.ristic@mcgill.ca> Litho room
wyko Wyko NT8000 John Li <jun.li@mcgill.ca> Litho room
Thin film deposition
Coral Name Makesort icon Model contact location
nexdep Angstrom Engineering Inc NexDep John Li <jun.li@mcgill.ca> Etch/Dep room
dentone14 Denton Vacuum Explorer 14 zhao.lu@mcgill.ca Etch/Dep room
parylene Specialty Coating Systems SCS200 Sasa Ristic <sasa.ristic@mcgill.ca> Etch/Dep room
bjd1800 Temescal bjd1800 alireza.hajhosseinimesgar@mcgill.ca Etch/Dep room
Dry Etching
Coral Name Makesort icon Model contact location
am5000-chA or am5000-chB or am5000-chC Applied Materials P5000 Peng Yang <peng.yang2@mcgill.ca> Etch/Dep room
dsb6000 Nanoplas DSB6000 Sasa Ristic <sasa.ristic@mcgill.ca> Etch/Dep room
sde110 Tegal SDE110 John Li <jun.li@mcgill.ca>, Peng Yang <peng.yang2@mcgill.ca Etch/Dep room
xef2 Xactix e2 Sasa Ristic <sasa.ristic@mcgill.ca> Etch/Dep room
Chemical Vapor Deposition
Coral Name Makesort icon Model contact location
pecvd Applied Materials P5000 Peng Yang <peng.yang2@mcgill.ca> Etch/Dep room
gemstar8_ald Arradiance Inc. GEMStar-8™ John Li Litho room
tylannitride or tylanpoly Tystar Tylan John Li <jun.li@mcgill.com> Etch/Dep room
Wet Etching
Coral Name Makesort icon Model contact location
n/a Crest Ultrasonics CP1100D Sasa Ristic <sasa.ristic@mcgill.ca> Etch/Dep room
wbgen-nonhf SIC Bromont --- Sasa Ristic <sasa.ristic@mcgill.ca>; Alireza Hajhosseini Mesgar <alireza.hajhosseinimesgar@mcgill.ca> Etch/Dep room
wbgen-hf SIC Bromont --- Sasa Ristic <sasa.ristic@mcgill.ca>; Alireza Hajhosseini Mesgar <alireza.hajhosseinimesgar@mcgill.ca> Etch/Dep room
wbsolvent SIC Bromont --- Sasa Ristic <sasa.ristic@mcgill.ca>; Alireza Hajhosseini Mesgar <alireza.hajhosseinimesgar@mcgill.ca> Etch/Dep room
lithosolv SIC Bromont --- Sasa Ristic <sasa.ristic@mcgill.ca>; Alireza Hajhosseini Mesgar <alireza.hajhosseinimesgar@mcgill.ca> Litho room
wb-si-etch SIC Bromont --- Sasa Ristic <sasa.ristic@mcgill.ca>; Alireza Hajhosseini Mesgar <alireza.hajhosseinimesgar@mcgill.ca> Etch/Dep room
Lithography
Coral Name Makesort icon Model contact location
n/a Electronic Micro Systems Ltd. 1000-1 John Li <jun.li@mcgill.ca>, Peng Yang <peng.yang2@mcgill.ca Litho room
evg101 EVGroup EVG101 John Li <jun.li@mcgill.ca> Litho room
evg620 EVGroup EVG620 John Li <jun.li@mcgill.ca>; Alireza Hajhosseini Mesgar <alireza.hajhosseinimesgar@mcgill.ca> Litho room
oven FisherScientist Isotemp John Li <jun.li@mcgill.ca>;Alireza Hajhosseini Mesgar <alireza.hajhosseinimesgar@mcgill.ca> Litho room
n/a J.C. Nabity, Lithography Systems NPGS John Li <jun.li@mcgill.ca>, Sasa Ristic <sasa.ristic@mcgill.ca> Wong Microscopy center
laurell Laurell WS-400-6NPP-LITE John Li <jun.li@mcgill.ca>; Alireza Hajhosseini Mesgar <alireza.hajhosseinimesgar@mcgill.ca> Litho room
laurell-develop Laurell WS-1000MH/EDC-650-8B Zhao Lu <zhao.lu@mcgill.ca> Litho room
oai200 Optical Associates Inc. 200 John Li <jun.li@mcgill.ca> Litho room
sitecoat Site Service Spinball John Li <jun.li@mcgill.ca> Litho room
mira TESCAN MIRA3 XMH John Li <jun.li@mcgill.ca>, Sasa Ristic <sasa.ristic@mcgill.ca> Wong Microscopy center
yes Yield Engineering Systems 310 John Li <jun.li@mcgill.ca>; Alireza Hajhosseini Mesgar <alireza.hajhosseinimesgar@mcgill.ca> Litho room
Thermal Processes
Coral Name Makesort icon Model contact location
JetFirst200 Qualiflow Therm JetFirst 200 Zhao Lu <zhao.lu@mcgill.ca> Etch/Dep room
tylanox Tystar Tytan John Li <jun.li@mcgill.ca> Etch/Dep room
tylanox2 Tystar Tytan John Li <jun.li@mcgill.ca> Etch/Dep room