OPERATING MANUAL 

Purpose

Hexamethyldisilazane (HMDS) is widely used in the semiconductor industry to improve photoresist adhesion to substrate. It is used with differing types of substrates including silicon dioxide (thermal, SOG, LPCVD, PECVD), silicon, polysilicon, silicon nitride, metal silicides, aluminum and others. Vapor priming in Y.E.S oven allows for HMDS application in a monolayer and reduces the chance of contamination.

Scope

The manual provide the operation guidance of Y.E.S Oven for HMDS coating.

Applicable Documents

• YES oven operation manual
• HMDS MSDS

Safety and Restrictions:

Do not allow HMDS to contact your skin and avoid inhalation. HMDS is flammable and reacts with strong oxidizers and reducing agents. This chemical can easily be detected by its strong odor. Report to staff a strong odor is present in the vicinity of the Y.E.S oven.

• Any materials that cannot withstand 150ºC temperatures.
• Substrates should be clean and dry

Available Processes

General description of vapor prime process

The following is a general description of the Y.E.S oven vapor prime process

Stage 1: Dehydration and purging oxygen from the chamber

Stage 2: Priming

Stage 3: Purging Prime Exhaust

Stage 4: Return to Atmosphere

Available Recipes

Operation Procedures

Priming

• Enable Oven in Coral system
• Check to see that the following are correct
  • The vacuum pump is ON
  • The temperature setpoint is 150°C

• Open door of the Oven: By setting Thumbwheel Setting to “0” and Press START to vent (3:30mins)   
• Place quartz cassette with wafers into the oven.
  • For small pieces, place a dummy silicon wafer flat on the quartz holder and set your samples on the wafer
• Close the door to make sure rubber seal is seated correctly and also check to see if it is not cracked.
• Choose the desired recipes by set the corresponding Thumbwheel Setting and push START button.
• When the full cycle is completed length of cycle: approx. 22 min. (for the standard 2min prime recipe), the “COMPLETE” light will blink. Pushing the RESET button can turn it off.
• Open the door and remove wafer carriers.
• After your run is finished, put the oven back to vacuum by setting the thumbwheel to “8” and wait after about 1 min
• Press RESET button to leave the chamber at vacuum.
• Disable the OVEN in Coral system.

 Dehydration without priming

 The Y.E.S. oven can be used a vacuum oven to dehydrate your samples. To do so, follow the below instructions:

• Open the chamber door with thumbwheel setting at “0” and pressing START
• Place quartz cassette with wafers into the oven.
  • For small pieces, place a dummy silicon wafer flat on the quartz holder and set your samples on the wafer
• Then put the oven back to vacuum by setting thumbwheel to “8” and wait after about 5 min and press RESET button to leave the chamber at Vacuum.
• After reaching your desired dehydration time, open the chamber with thumbwheel setting of “0” to vent and then remove your samples.
• Leave the oven back to vacuum by setting thumbwheel to “8” and wait after about 1 min and press RESET button to leave the chamber at Vacuum.