Make:
Tystar
Model:
Tytan
category:
Thermal Processes
contact:
John Li <jun.li@mcgill.ca>
location:
Etch/Dep room
install:
Fri, 11/01/2002
Coral Name:
tylanox
Description:
Wet and dry oxidation. Non CMOS grade oxide. OPERATING MANUAL
Not yet available. Contact staff.
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