SU-8 2005

SU-8 2005 thicknesses vs. spin speed for Laurell coater

Coating conditions are:

- spread at 500 rpm for 5 s with acceleration of 87 rpm/s

- spin between 1500 and 5000 rpm for 30 s with acceleration of 348 rpm/s

- bake at 95 °C for 2 min

The following table gives thicknesses vs. speed measured at the center of silicon samples of 1x1 cm².

Spin speed (rpm) Thickness measured with mechanical profiler (µm) Thickness measured with ellipsometer (µm) Thickness measured with reflectometer (µm)
1500 6.79 n/a 6.61
2000 5.96 5.87 5.87
3000 5.24 5.22 5.22
4000 5.11 5.04 5.04
5000 5.02 4.93 4.98