Sputtering

Denton Explorer 14

Date Material Cathode Power/Current RF Bias Pressure Gas Rotation Approx. Rate Temperature Comment
May 2012 Mo DC 1.1A - 10mT Ar 50% 9 A/s RT  
Jan 2012 Au DC  0.2A - 5mT  Ar 50%  4 A/s  RT  
Jan 2012  Ti DC 0.6A  - 8mT Ar 50%  1.75 A/s  RT  
March 2011 Cr DC 1A - 5mT Ar 50% 5.8 A/s RT  
June 2011 ITO RF 200W 20W 4.9mT Ar/O2 2% 50% 1.52 A/s RT SheetResistance: 30-36 Ohm/sq
June 2011 ITO RF 200W 20W 4.9mT Ar/O2 2% 50% 1.34 A/s 300°C

SheetResistance: 17-21 Ohm/sq

Feb 2016 Al DC 0.6 A - 12mT Ar 50% 2A/s RT

very rough surface for 400nm.

More details about rates variation over time here.

MRC 603

Date Material Gas HiVac Power Pressure ScanSpeed # of scans Thickness Comments
2010 Al 1 6e-7T 3kW 10mT 20cm/min 1 2285A  
2010 Cr 1 6e-7 1kW 10mT 19.5cm/min 1 1000A  
2009 SiC 1 8e-7 2kW 6.5mT 5cm/min 1 2223A  

More details about rates variation over time here.