S1805 spin coating

Process for Laurell coater

Coating conditions are:

- spread at 500 rpm for 5 s with acceleration of 1305 rpm/s

- spin between 1500 and 5000 rpm for 30 s with acceleration of 1305 rpm/s

- bake at 115 °C for 1 min

The following table gives thicknesses vs. speed measured at the center of silicon samples of 1x1 cm².

Spin speed (rpm) Thickness measured with mechanical profiler (nm) Thickness measured with ellipsometer (nm) Thickness measured with reflectometer (nm)
1500 n/a 759 n/a
2000 n/a 667 n/a
3000 n/a 562 n/a
4000 n/a 488 n/a
5000 n/a 415

n/a