Recipe: OX DEP 300 DEG
| Date | Dep Time [s] | Thickness [nm] | Dep Rate [nm/sec] | |
| 2015-01-12 | 200 | 1945 | 9.7 | |
| 2015-01-30 | 200 | 1867 | 9.3 | SiH4 bottle changed |
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Recipe: OX DEP 300 DEG
| Date | Dep Time [s] | Thickness [nm] | Dep Rate [nm/sec] | |
| 2015-01-12 | 200 | 1945 | 9.7 | |
| 2015-01-30 | 200 | 1867 | 9.3 | SiH4 bottle changed |