Make:
SIC Bromont
Model:
---
category:
Wet Etching
contact:
Zhao Lu <zhao.lu@mcgill.ca>; Alireza Hajhosseini Mesgar <alireza.hajhosseinimesgar@mcgill.ca>
location:
Etch/Dep room
install:
Sun, 03/01/2009
Coral Name:
wbgen-nonhf
Description:
Wet bench dedicated to non-hf acids. Dump rinser and hotplate available.
| Chemicals that can be used | Processes allowed |
|---|---|
|
Hydrochloric acid Sulfuric acid Phosphoric acid Nitric acid Nanostrip Hydrogen peroxide Ammonium hydroxide Aluminum etchant Chromium etchant Gold etchant |
RCA-1 RCA-2 Piranha cleaning Metal etching |
Waste
- The regular acids can be dumped down the chemical drain, but need to keep minimum 15 mintues interval between two consective dumping, using the large black timer for this purpose.
- The heated solutions must be cooled down to room temperature prior to dumping.
- Metal etchants must be discarded into the yellow waste containers located in the drawer.
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