Materials Available in the Microfab

Material Thick. Range Deposition Dry Etch Wet Etching
    Tool Dep rate Doc Tool Etch Rate Recipe Mask Doc Tool Etch rate Solution Mask Doc
Shipley S1805 0.5-1um SiteCoater N/A   PVATepla   350W, 1mBar     Solvent   Acetone    
Shipley S1813 1.1-1.7um SiteCoater N/A   PVATepla   350W, 1mBar     Solvent   Acetone
AZ9245 3.5-9um SiteCoater N/A         Solvent   Acetone
SU8 neg. resist 2-200µm SiteCoater N/A                    
Polyimide 1000-2500A SiteCoater N/A   AMAT P5K RIE 300-350nm/min polyimide (O2) Resist (1:!) yes          
Spin-on-glass 1000-9000A SiteCoater N/A yes                    
PMMA 50-300nm Laurell N/A   AMAT P5K RIE 7200A/min PMMA 250nm Al            
 Metals                            
 Titanium (Ti)  0-5000A  Denton E14  ~3A/s   yes            Metal Etch    HF:H2O2:H2O 1:1:20 Resist  
   0-5000A  MRC                        
 Titanium Nitride (TiN)  0-5000A  Denton E14  0.8A/s  no  AMAT P5K RIE    CF4  Resist    Metal Etch  NH4OH:H2O2  Resist  
 Gold (Au)  0-5000A   Denton E14  ~4A/s   yes            TFA Gold Etchant  28A/s @ 25°C  KI/I2 based
  Resist http://www.transene.com/au_etchant.html