LPCVD Silicon

  TYTAN TUBE POLY                    
  RECIPE NAME ASI525                    
  VERSION 1.01                    
  ISSUE DATE 29 MAR 10                    
  PURPOSE Deposit 220 nm of Amorphous Silicon (ASI) @ 525 C          
  TOTAL TIME 449 min = 7 hrs 29 min TOTAL = OVERHEAD + DEPOSITION  
  OVERHEAD TIME 249 min = 4 hrs 9 min        
  DEPOSITION TIME 200 min = 3 hrs 20 min        
  MAXIMUM DEPOSITION TIME 231 min Assuming a maximum total time of 8 hrs        
  DEPOSITION RATE (NOMINAL) 1,1 nm/min                  
  MAXIMUM DEPOSITED THICKNESS 254 nm Assuming the maximum deposition time and the nominal deposition rate    
  TOTAL N2 CONSUMPTION 235000 cc = 235 liters of Nitrogen gas      
  TOTAL SiH4 CONSUMPTION 28280 cc = 28,28 liters of Silane gas      
                         
                         
                         
    PROGRAMMABLE PARAMETERS       GAS CONSUMPTION
    hh:mm:ss Celsius sccm sccm mTorr cm/min     min cc cc
STEP DESCRIPTION TIME TEMP N2 SIH4 PRESS SPEED     DURATION N2 SiH4
0 INIT 00:00:00 400 0 0 0 0     0 0 0
1 BACKFILL F 00:02:00 400 200 0 0 0     2 400 0
2 BACKFILL C 00:20:00 400 5000 0 0 0     20 100000 0
3 BOAT OUT 00:01:00 400 0 0 0 50     1 0 0
4 BOAT IN 00:10:00 400 0 0 0 50     10 0 0
5 DOOR CHECK 00:01:00 400 0 0 0 0     1 0 0
6 PUMP DOWN 00:10:00 450 0 0 0 0     10 0 0
7 PUMP PURGE 00:02:00 450 200 0 0 0     2 400 0
8 PUMP DOWN 00:05:00 450 0 0 0 0     5 0 0
9 PUMP PURGE 00:02:00 450 200 0 0 0     2 400 0
10 PUMP DOWN 00:05:00 450 0 0 0 0     5 0 0
11 LEAK CHECK 00:02:00 450 0 0 0 0     2 0 0
12 VACCONT 00:05:00 450 0 0 0 0     5 0 0
13 525TEMPRAM 00:25:00 475 200 0 350 0     25 5000 0
14 525STAB 00:15:00 475 200 0 350 0     15 3000 0
15 525PROF 00:30:00 525 200 0 350 0     30 6000 0
16 525TCHECK 00:02:00 525 0 0 0 0     2 0 0
17 N2 PUMP OUT 00:00:30 525 0 0 0 0     0 0 0
18 PRE DEP 00:02:00 525 0 140 350 0     2 0 280
19 DEP 03:20:00 525 0 140 350 0     200 0 28000
20 PUMP DOWN 00:05:00 450 0 0 0 0     5 0 0
21 400 RADOWN 00:45:00 400 200 0 0 0     45 9000 0
22 PUMP PURGE 00:02:00 400 200 0 0 0     2 400 0
23 PUMP DOWN 00:05:00 400 0 0 0 0     5 0 0
24 BACKFILL F 00:02:00 400 200 0 0 0     2 400 0
25 BACKFILL C 00:20:00 400 5000 0 0 0     20 100000 0
26 BOAT OUT 00:10:00 400 1000 0 0 50     10 10000 0
27 UNLOAD 00:00:10 400 0 0 0 0     0 0 0
28 BOAT IN 00:10:00 400 0 0 0 50     10 0 0
29 DOOR CHECK 00:01:00 400 0 0 0 0     1 0 0
30 PUMP DOWN 00:10:00 400 0 0 0 0     10 0 0
31                        
32                        
33 DOOR AB 00:00:10 400 0 0 0 0          
34                        
35                        
36                        
37 AB VAC 99:00:00 400 0 0 0 0          
38                        
39                        
40                        
41                        
42 AB NOVAC 00:00:10 400 0 0 0 0