Protocol: Load 3 oxidized process wafers in place of 3 dummy wafers. Measure polysi thickness with Nanospec.
| Date | Recipe | Time | Average 4inch boat | Unif | Dep Rate | Average 6inch boat | Unif | Dep Rate | ref |
| 2012-05-31 | 620poly | 20 | 2976A | 0.75% | 148A/min | - | - | - | details |
| 2012-06-04 | 620poly | 30 | 4376A | 0.70% | 145A/min | - | - | - | details |
Amorphous silicon
| Date | Recipe | Time | Average 4inch boat | Unif | Dep Rate | Average 6inch boat | Unif | Dep Rate | ref |
| 2012-06-06 | 550AGLAS | 60min | 1400 | 23.3A/min | done on borofloat wafer | ||||
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