LPCVD Polysilicon Tube

Protocol: Load 3 oxidized process wafers in place of 3 dummy wafers. Measure polysi thickness with Nanospec.

Date Recipe Time Average 4inch boat Unif Dep Rate Average 6inch boat Unif Dep Rate ref
2012-05-31 620poly 20 2976A 0.75% 148A/min - - - details
2012-06-04 620poly 30 4376A 0.70% 145A/min - - - details
                   
                   

 

Amorphous silicon

Date Recipe Time Average 4inch boat Unif Dep Rate Average 6inch boat Unif Dep Rate ref
2012-06-06 550AGLAS 60min       1400   23.3A/min done on borofloat wafer