LPCVD Nitride

Silicon Nitride Recipe

Color Chart for Silicon Nitride

 


  TUBE NITRIDE                      
  RECIPE HSN800                      
  VERSION 1.00                      
  ISSUE DATE 31 MAR 10                      
  PURPOSE Deposit ~ 120 nm of High Stress Silicon Nitride (Si3N4) @ 800 C          
  TOTAL TIME 300 min = 5 hrs 0 min          
  BASE TIME 280 min = 4 hrs 40 min          
  DEPOSITION TIME 20 min = 0 hrs 20 min          
  MAX DEP TIME 200 min                    
  DEP RATE - NOMINAL 6,0 nm/min                    
  MAX THICKNESS 1200 nm                    
  TOTAL N2 112000 cc = 112 liters of Nitrogen gas        
  TOTAL DCS 700 cc = 0,7 liters of Dichlorosilane gas        
  TOTAL NH3 2530 cc = 2,53 liters of Ammonia gas        
                           
                           
    PROGRAMMABLE PARAMETERS     GAS CONSUMPTION
    hh:mm:ss Celsius sccm sccm sccm mTorr cm/min   min cc cc cc
STEP DESCRIPTION TIME TEMP N2 NH3 DCS PRESS SPEED   TIME N2 NH3 DCS
0 INIT 00:00:00 350 0 0 0 0 0   0 0 0 0
1 BACKFILL F 00:02:00 350 200 0 0 0 0   2 400 0 0
2 BACKFILL C 00:09:00 350 5000 0 0 0 0   9 45000 0 0
3 BOAT OUT 00:00:10 350 100 0 0 0 50   0 0 0 0
4 BOAT IN 00:10:00 350 0 0 0 0 50   10 0 0 0
5 DOOR CHECK 00:01:00 350 0 0 0 0 0   1 0 0 0
6 PUMP DOWN 00:20:00 350 0 0 0 0 0   20 0 0 0
7 PUMP PURGE 00:02:00 350 200 0 0 0 0   2 400 0 0
8 PUMP DOWN 00:05:00 350 0 0 0 0 0   5 0 0 0
9 LEAK CHECK 00:02:00 350 0 0 0 20 0   2 0 0 0
10 PUMP DOWN 00:05:00 350 0 0 0 0 0   5 0 0 0
11 800TEMPRAM 01:00:00 800 200 0 0 400 0   60 12000 0 0
12 800STAB 00:10:00 800 200 0 0 400 0   10 2000 0 0
13 800PROF 00:30:00 800 200 0 0 400 0   30 6000 0 0
14 TCHECK 00:02:00 800 200 0 0 400 0   2 400 0 0
15 N2 PUMP OUT 00:00:30 800 0 0 0 0 0   0 0 0 0
16 INT NH3 00:01:00 800 0 110 0 0 0   1 0 110 0
17 INT NH3 00:02:00 800 0 110 0 400 0   2 0 220 0
18 Si3N4 DEP 00:20:00 800 0 110 35 400 0   20 0 2200 700
19 PUMP DOWN 00:02:00 800 0 0 0 0 0   2 0 0 0
20 350 RAMPDOWN 01:00:00 350 0 0 0 0 0   60 0 0 0
21 PUMP PURGE 00:02:00 350 200 0 0 0 0   2 400 0 0
22 PUMP DOWN 00:02:00 350 0 0 0 0 0   2 0 0 0
23 BACKFILL F 00:02:00 350 200 0 0 0 0   2 400 0 0
24 BACKFILL C 00:09:00 350 5000 0 0 0 0   9 45000 0 0
25 BOAT OUT 00:00:10 350 100 0 0 0 50   0 0 0 0
26 BOAT IN 00:11:00 350 0 0 0 0 50   11 0 0 0
27 DOOR CHECK 00:01:00 350 0 0 0 0 0   1 0 0 0
28 PUMP DOWN 00:30:00 350 0 0 0 0 0   30 0 0 0
29                          
30                          
31                          
32                          
33                          
34                          
35                          
36 AB VAC 99:00:00 350 200                  
37                          
38 AB NOVAC 00:00:10 350 200                  
39                          
40 DOOR CK. 00:01:00