LOR 3A spin coating

Process for Laurell coater

Coating conditions are:

- spread at 500 rpm for 5 s with acceleration of 10005 rpm/s

- spin between 1500 and 5000 rpm for 45 s with acceleration of 10005 rpm/s

- bake at 180 °C for 5 min

The following table gives thicknesses vs. speed measured at the center of silicon samples of 1x1 cm².

Spin speed (rpm) Thickness measured with ellipsometer (nm) Thickness measured with reflectometer (nm)
1500 442 440
2000 377 378
3000 307 310
4000 270 270
5000 251 250