Make:
SIC Bromont
Model:
---
category:
Wet Etching
contact:
Alireza Hajhosseini Mesgar <alireza.hajhosseinimesgar@mcgill.ca>; Zhao Lu <zhao.lu@mcgill.ca>
location:
Litho room
install:
Mon, 11/03/2008
Coral Name:
lithosolv
Description:
Wet bench in the litho room dedicated to resist development and solvent cleaning.
OPERATING MANUAL
Not yet available. Contact staff.
|
Chemicals that can be used |
Processes allowed |
|---|---|
|
Acetone IPA Methanol MIBK Resists MF-319 AZ developers SU-8 developer |
Development of resists by immersion Preparation of mixtures for spray coating Sample cleaning |
Waste
20L waste container in the drawer.
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