List of chemicals available in the cleanroom

A detailed list of chemicals can be viewed in myLab (username and password: microfab).

Acids/bases
Name Formula CAS number WHMIS class Technical data MSDS
Acetic acid CH3COOH

64-19-7

Ammonium hydroxide NH4OH 1336-21-6
Buffured oxide etchant 6:1 NH4F 40 %:HF 49 % 6:1

12125-01-8

7664-39-3

Dilute HF 10:1 H2O:HF 49% 10:1

7732-18-5

7664-39-3

Hydrochloric acid HCl 7647-01-0
Hydrofluoric acid HF 7664-39-3
Nano-Strip H2SO4 + H2SO5 + H2O2 + H2O    
Nitric acid HNO3 7697-37-2
Phosphoric acid H3PO4 7664-38-2
Potassium hydroxide KOH 1310-58-3
Sulfuric acid H2SO4 7664-93-9
Tetramethylammonium hydroxide (TMAH) C4H13NO 75-59-2

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Gases
Name Formula CAS number WHMIS class Technical data MSDS
Ammonia NH3 7664-41-7
Argon Ar 7440–37–1
Carbon dioxyde CO2 124-38-9
Chlorine Cl2 7782-50-5
Dichlorosilane SiH2Cl2 4109-96-0
Helium  He 7440-59-7
Hydrogen H2 1333-74-0
Hydrogen bromide HBr 10035-10-6
Methane CH4 74-82-8    
Nitrogen N2 7727-37-9
Nitrogen trifluoride NF3 7783-54-2
Nitrous oxide N2O 10024-97-2
Octofluorocyclobutane C4F8 115-25-3
Oxygen O2 7782-44-7
Silane SiH4 7803-62-5
Sulfur hexafluoride SF6 2551-62-4
Tetrafluorocarbon CF4 75-73-0    
Trifluoromethane CHF3 75-46-7

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Metal etchants
Name Formula CAS number WHMIS class Technical data MSDS
Aluminum etchant type A

 

Chromium etchant type 1020
CR-14S
Gold etchant type TFA

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Resists/developers for photolithography
Name Formula CAS number WHMIS class Technical data MSDS
AZ 400K developer
AZ 726 MIF developer        
AZ 5214-E IR
AZ 9245
Hexamethyldisilazane (HMDS) [(CH3)3Si]2NH 999-97-3
LOR 3A
LOR 5A See LOR 3A See LOR 3A
LOR 5B See LOR 3A
MF-319 developer

Omnicoat
S1805
S1813 See S1805
SU-8 2000 thinner 120-92-3
SU-8 2002
SU-8 2005       See SU-8 2002 See SU-8 2002
SU-8 2010       See SU-8 2002 See SU-8 2002
SU-8 2015 See SU-8 2002 See SU-8 2002
SU-8 2050 See SU-8 2002
SU-8 developer

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Resists for e-beam lithography
Name Formula CAS number WHMIS class Technical data MSDS
EL thinner C5H10O3 97-64-3
MMA(8.5)MAA EL 11
PMMA 950 A2 See MMA(8.5)MAA EL 11

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Solvents
Name Formula CAS number WHMIS class Technical data MSDS
Acetone (CH3)2CO 67-64-1
AZ 300T stripper
EBR PG
Isopropyl alcohol (IPA) (CH3)2CHOH 67-63-0
Methanol CH3OH 67-56-1
Methyl ethyl ketone (MEK) CH3C(O)CH2CH3 78-93-3
Methyl isobutyl ketone (MIBK) (CH3)2CHCH2C(O)CH3 108-10-1
Remover PG C5H9NO 872-50-4

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Others
Name Formula CAS number WHMIS class Technical data MSDS
Borofilm 100
Copper sulfate        
Crystalbond 555
DuraSeal
Hydrogen peroxyde H2O2 7722-84-1
Liquid nitrogen N2 7727-37-9    
Kapton
Nickel sulfamate        
Parafilm
Parylene C
Silver ink   7440-22-4    
Technic Cu 2800 brightner        
Technic Cu 2800 carrier        
Technic Cu 2800 replenisher      
Xenon fluoride XeF2 13709-36-9

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