Procedure

• Prior using the tool
• Chuck replacement
• Purging the AZ developer line
• Program editing
• Loading the substrate on the chuck
• Program selection and running

Prior using the tool

• Check the status in Coral or consult the website
• Check the developer level in the drawer of the station
• If needed, fill up the developer bottle on the litho wet bench

Chuck replacement

• Open the lid
• Remove the white plastic cap at the center of the chuck installed in the tool
• Unscrew the 2 screws holding the chuck with the Allen key
• Place the new chuck and tighten the screws
• Put the cap at the center of the new chuck

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Purging the AZ developer line

• Fill up a large beaker with DI water
• Open the drawer and install the beaker in place of the AZ developer
• Run the program to purge and rinse the tubing
• Remove the beaker and place the new AZ developer bottle
• Run program again to fill the tubing with the new developer

Loading the substrate on the chuck

• Make sure that the plastic pins of the chuck hold the substrate properly

Warning: Flats of a wafer must not face the plastic pins, the wafer edge must touch the plastic pins.

Program editing

Program selection and running

• Press SELECT PROCESS button on the controller
• Select the program with the up/down arrow keys on the controller
• Press START button to run the program

Unloading the substrate

• Open the lid carefully. Some droplets may drop from the dome.
• Load the next substrate if needed.
• Close the lid