Make:
Laurell
Model:
WS-1000MH/EDC-650-8B
category:
Lithography
contact:
zhao.lu@mcgill.ca
location:
Litho room
Coral Name:
laurell-develop
Description:
Developing station for wafers (2, 3, 4 and 6 inches) and photomasks (3, 5 and 7 inches)
Developers available: MF-319, AZ 400K, AZ 726 MIF, AZ 300 MIF Procedure
- Prior using the tool
- Chuck replacement
- Purging the AZ developer line
- Program editing
- Loading the substrate on the chuck
- Program selection and running
Prior using the tool
- Check the status in Coral or consult the website
- Check the developer level in the drawer of the station
- If needed, fill up the developer bottle on the litho wet bench
Chuck replacement
- Open the lid
- Remove the white plastic cap at the center of the chuck installed in the tool
- Unscrew the 2 screws holding the chuck with the Allen key
- Place the new chuck and tighten the screws
- Put the cap at the center of the new chuck
Purging the AZ developer line
- Fill up a large beaker with DI water
- Open the drawer and install the beaker in place of the AZ developer
- Run the program to purge and rinse the tubing
- Remove the beaker and place the new AZ developer bottle
- Run program again to fill the tubing with the new developer
Loading the substrate on the chuck
- Make sure that the plastic pins of the chuck hold the substrate properly
Warning: Flats of a wafer must not face the plastic pins, the wafer edge must touch the plastic pins.
Program editing
Program selection and running
- Press SELECT PROCESS button on the controller
- Select the program with the up/down arrow keys on the controller
- Press START button to run the program
Unloading the substrate
- Open the lid carefully. Some droplets may drop from the dome.
- Load the next substrate if needed.
- Close the lid
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