Name | wafer size |
Resist |
Thickness | Bake Temp, Time |
Comments | Editable |
---|---|---|---|---|---|---|
4C14B115.LN | 100mm | 1813 | 1.4um | 115C, 60s |
Coat a 4inch wafer with 1.4µm of S1813 resist - EBR included - bake @ 115°C for 60s | No |
6C14B115.LN | 150mm |
1813 | 1.4um | 115C, 60s | Coat a 6inch wafer with 1.4µm of S1813 resist - EBR included - bake @ 115°C for 60s |
No |
6C20B115.LN |
150mm | 1813 | 2.0um | 115C, 60s | Coat a 6inch wafer with 2µm of S1813 resist - EBR included - bake @ 115°C for 60s | No |
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