Index of Recipes

Name wafer size
Resist
 Thickness Bake Temp, Time
Comments  Editable
4C14B115.LN 100mm  1813  1.4um  115C, 60s
 Coat a 4inch wafer with 1.4µm of S1813 resist - EBR included - bake @ 115°C for 60s  
No
6C14B115.LN 150mm
 1813  1.4um  115C, 60s Coat a 6inch wafer with 1.4µm of S1813 resist - EBR included - bake @ 115°C for 60s
No
6C20B115.LN
 150mm  1813  2.0um   115C, 60s  Coat a 6inch wafer with 2µm of S1813 resist - EBR included - bake @ 115°C for 60s  No