Make:
Electronic Micro Systems Ltd.
Model:
1000-1
category:
Lithography
contact:
jun.li@mcgill.ca; peng.yang2@mcgill.ca
location:
Litho room
install:
Wed, 08/12/2015
Coral Name:
n/a
Description:
Temperatures from 50 °C to 200 °C
Accurate to +/- 1% across working surface
Vacuum port to ensure intimate contact between substrate and hotplate
Wafers from 2 " to 6", photomasks up to 5 "
Shallow grooves to position substrates properly
Computer temperature controller with digital readout
Prior using the tool
-
Check the backside of the carrier wafer and the hotplate surface. Any trace of photoresist or any scratch must be reported immediately.
Instructions
- Turn the hot plate on if off. Wait until the “test” message disappears.
- Turn off the vacuum and remove the carrier wafer with wafer tweezers.
- Press “P” on the controller.
- Use the “up” and “down” arrows to set the temperature between 50 and 200 °C.
- Press “P” to validate the setpoint.
- Wait until the required temperature is reached.
- Put your samples on the carrier wafer and place the latter with wafer tweezers on the hot plate. Turn the vacuum on if desired.
Warning: Do not place samples directly on the hotplate and do not use stainless steel sample tweezers as they can scratch the anodized surface of the hotplate.
Only wafers and wafer tweezers are allowed.- Turn off the vacuum off and remove the carrier wafer. Remove your samples.
- Put the carrier wafer back on the hotplate.
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