Make:
Tencor
Model:
Flexus 5200
category:
Metrology
contact:
jun.li@mcgill.ca
location:
Etch/Dep room
install:
Fri, 11/01/2002
Coral Name:
flexus
Description:
Stress measurement via surface radius characterization. The Flexus 5200 Film stress meter system calculates film stresses. It optically measures a wafer curvature radius with and without the deposited film; knowing the wafer thickness, the film thickness and the wafer modulus, Stoney's equation yields the film stress.
OPERATING MANUAL
This attached set of spreadsheets computes the stress from Stoney's equation and wafer radius of curvature measurements, with and without film. It is necessary to input the substrate and film thicknesses, as well as the substrate modulus. Repetitive radius measurements reduce the data "noise" inherent to this measurement.
| Attachment | Size |
|---|---|
| Stress Calculator v1.1.xlsx | 179.7 KB |
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