Reservations (link to screencasts)
Equipment and process (link to screencasts)
- Create a lot
- Engage Equipment
- Edit/add run data when equipment is engaged
- Disengage equipment
- Edit/add saved run data
- Export run data
Equipment Status (link to screencasts)
Reservations
Make a reservation
- Select reservation tab
- Select a machine that you are qualified for. If you are qualified for a machine, there will be a "*" next to the name of the machine. If you are not qualified, please contact a labstaff for training
- Highlight time
- Select Reservation Actions > Make
- Enter/confirm Project and Account information
View a Reservation
- Select reservation tab
- Select a machine
- Double-click on a reservation
- Select Reservation > Next or Previous to view browse through the reservation calendar
Delete a reservation
- Select reservation tab
- Select a machine
- Select a reservation
- Select Reservation Actions > Delete
Equipment and process
Create a lot
- Select Process Actions > Create Lot
- Select Project
- Enter Lot Name, Lot Description, Estimated Number of wafers
- Click Create
Engage Equipment
- Select a qualified machine not being used by another user
- Select Equipment Actions > Enable
- Enter Project information and click OK
- Choose Process
- Enter Run data
- Click Save
Edit/add run data when equipment is engaged
- Select Machine that is enabled
- Select Process Actions > Enter Run Data
- Choose process (default process is a comment only, specific processes have been defined for each machine)
- Edit/Add run data
- Click Save
Disengage equipment
- Select an "enabled" equipment
- Select Equipment Actions > Disable
- Optionally enter/edit run data
- Click Save and Disable
Edit/add saved run data
When you want to modify Run Data after the equipment has been disabled:
- Select History tab
- Select the machine on which you want to edit/add run data
- You should the time period when the equipment was enabled by you
- Double click on this time period
- Click Ok in the popup window
- Click Adjust in the new window named "Run Data History"
- Adjust your run data and Save Adjusted Run Data
Export Run Data
Run data can be exported as a text file for offline analysis
- Select Machine
- Select Process Actions > Export Run Data
- Select Process for which Run Data should be exported
- Select time period
- Click Export
- Click Save to save the data as a text file
Equipment Status
Make a comment
- Select a machine
- Select Equipment Actions > Make Comment
- Enter Subject and detailed comment
- Click Submit
Report problems
- Select a machine
- Select Equipment Actions > Report Problem
- Enter Subject and detailed description of the problem
- Click Submit : the light tool status will become "orange" until one staff member clears the problem
Shutdown: in case of emergency
- Select a machine
- Select Equipment Actions > Shutdown
- Enter Subject and detailed description of the problem
- Click Submit : the light tool status will become "red" until one staff member clears the shutdowns and engage the machine while shutdown.
View equipment status
- Select Equipment Status tab
- Select one machine to view its status or,
- Select one area (e.g. Lithography) to view all machines status or,
- Select the whole lab (mnm) to view all the machine status
- Results can be filtered by state: shutdowns, problems, enabled, up.
Equipment maintenance record
- Select Maintenance Tab
- Select a machine
- A list of entry (shutdown, problem, comment) will be displayed
- Sort this list by date or by status or by type (Resolved, Unresolved, Comment, Shutdown, Problem)
- Click on the entry and select Show Message to view detailed message
Coral Menu Reference:
windows
- Resources: open the resource manager to modify personal data
- Report Engine: open the report engine in a new browser window
- Exit
Equipment Actions
- Enable: engage equipment
- Disable: disengage equipment
- Shutdown
- Report Problem
- Make Comment
- Qualify user
- Browse Manual: open equipment manual in a browser window
Process Actions
- Enter run Data: enter run data when equipment is enabled
- Display Run Data: display run data according to preset variable (Staff)
- Export Run Data: export run data in text file
- Create Lot: create lot to be used in Run Data
Reservation Actions
- Make
- Delete
- Next
- Previous
History Actions
- Next
- Previous
Staff Actions
- Charge Time
- Delete Charges
- Run Cost Recovery
- Process Subscriptions
- Next
- Previous
Supplies
- Check In
- Check out
- Item Check