Semiconductor physics
Sze, M. D. & Ng, K. K. (2007). Physics of semiconductors devices. Hoboken, NJ: J. Wiley.
Micro/nanofabrication
Plummer, J. D., Deal, M. D., & Griffin, P. B. (2000). Silicon VLSI technology: Fundamentals, practice, and modeling. Upper Saddle River, NJ: Prentice Hall.
Franssila, S. (2010). Introduction to microfabrication. Chichester, West Sussex, England: J. Wiley.
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