Books

Semiconductor physics

Sze, M. D. & Ng, K. K. (2007). Physics of semiconductors devices. Hoboken, NJ: J. Wiley.

 

Micro/nanofabrication

Plummer, J. D., Deal, M. D., & Griffin, P. B. (2000). Silicon VLSI technology: Fundamentals, practice, and modeling. Upper Saddle River, NJ: Prentice Hall.

Franssila, S. (2010). Introduction to microfabrication. Chichester, West Sussex, England: J. Wiley.