AZ5214 Processing for Image Reversal

  • Dehydration 150 °C 30 min in Yes oven
  • AZ5214 Spin coating at 4000 rpm 30 s, acceleration of 1000 rpm/s, on Site Coater
  • Prebake at 110 °C 1 min
  • Exposure D~5 mJ/cm2 on EVG620
  • Reversal bake at 120 °C 2 min, on Site Coater
  • Flood exposure of 250 mJ/cm2
  • Immersion or puddle development in AZ 726 MIF for 1 min

Cauchy law for ellipsometer: n = 1.604 + B/lambda^2, fit on B between 1.5 and 2.6 eV

Spin speed (rpm) Ellipsometer (µm) Profiler (µm) Reflectometer (µm)
1000 3.00 n/a n.a
2000 2.12 n/a n/a
3000 1.78 n/a n/a
4000 1.56 1.55 n/a
5000 1.48 n/a n/a