Make:
Arradiance Inc.
Model:
GEMStar-8™
category:
Chemical Vapor Deposition
contact:
Jun.li@mcgill.ca; zhao.lu@mcgill.ca
location:
Etch/Dep room
install:
Fri, 08/01/2014
Coral Name:
gemstar8_ald GEMStar ALD systems deposit metal, semiconductor and insulating films, support 6 inch wafer, up to 6 wafers a batch
Processes Available
• thermal Aluminum oxide
• thermal Titanium oxide
• thermal Hafnium oxide
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