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19 Apr 2018 Asher Asher Problem

Hi All,

The asher pump stopped working, most likely while a user was doing an etch considering the fact that the chamber looks messy. Unfortunatelly, this was not reported right away! Please, whoever knows about this, get in touch with me so that I can better dignose what happened. If you had something to do with this and do not get in touch after this message, we will find out using our camera surveillance, but if it comes to that, there will be penalties involved.

Thanks!

Sasa

 

18 Apr 2018 Metallization Unused reservations- and NexDep

Hi,

Recently several users have reserved one (or both) evaporators but not shown up. As there are many users trying to find a spot before closing the lab, if you cannot make it, please cancel the reservation. If the user does not use the reservation or is late for more than 30 minutes, any authorized user can use the equipment.

Best,

The Microfab TEam

18 Apr 2018 Laurell coater Laurel Coater is down

Hi,

The efforts to revive the Laurel coater have failed and it is down due to vacuum problems. Photoresist has been sucked inside the spin-coater that requires a major cleaning.

In the meantime for the remaining days (Wednesday and Thursday, April 18 and 19) before closing on Friday, there is another spin-coater available temporarily. If you need to use it, please contact me for a quick training.

 

Best,

Alireza Mesgar

13 Apr 2018 Facilities Urgent! Cleanroom shutdown from April 20. Please take all your belongings by 5pm, April 19.

just informed by Waste Management, all the chemicals need to be packaged and moved out of the cleanroom on April 20. Please take all your belongings in the lab by the end of April 19. Anything left will be put into boxes and you won't be able to access to them till Mid of July 2018, when the lab is supposed to be reopened.

 

Thanks for your cooperation!

 

Microfab

 

Dear Microfab Users, 

We are preparing for the phase 2 shutdown, which is scheduled from April 23, 2018 to July 2, 2018 for the renovation in the cleanroom. The phase 2 renovation will majorly focus on the Lithoroom, expension and assembely room as well as the brand new gas distribution and monitoring system. We must move out all the storage racks and cabinets in the cleanroom and relocate quite a few equipment in the lab.  Thus, we have to ask all our users to help

1. Take out all your storage box, mask set or other belongings in the cleanroom

2. For the chemicals belong to individual researcher or research group, 

                a. if you are not going to use these chemicals during the shutdown, just leave them there, we will work with waste management to store them in a proper place.

                b. if you will need these chemicals in your own lab at McGill or other facilities, please find a proper way to transport and store the chemicals 

3. For the chemicals belong to Nanotools, we will be responsible for the relocation and storage. However, if you need these chemicals for your research in McGill or other facility outside McGill, please let us know type and quantity/volume needed asap, we will try our best to meet your requirement and arrange the transportation to your lab or other facility (if they agree to accept the chemical). The cost involved will be based on the quantity asked, our purchasing price, and the shipping cost.

Please note the following deadline:

1. April 13, 2018: send us the chemical needed, type, volume, shipping address if outside McGill

2. April 19 , 2018: move out all your masks, storage box, wafer box, or other belongings.  

We understand that the shutdown may have significant impact on your research or study, we will try our best to minimize the challenge and make this transitional period short and smooth. The phase one renovation was completed on time, hopefully it will happen for phase 2. We are expecting to resume all of the services in the middle of July, will keep you posted on the progress of the renovation 

Again, we are sorry for any inconvenient induced by the shutdown. If you have any suggestion, comments or concerns, don’t hesitate to contact us.

looking forward to your kind collaboration

Microfab Team

13 Apr 2018 Denton E14 Denton Sputter is down due to turbo pump problem

Dear Denton Users, 

unfortunately, the system has to be shut down due to Turbo pump issue. The LED panel is off. I don't think we could put it back before the shut down. 

Sorry for the inconvenience. 

Regards

Microfab team

5 Apr 2018 Facilities Cleanroom Shutdown: From April 23 to July 2nd for Phase 2 renovation

Dear Microfab Users, 

We are preparing for the phase 2 shutdown, which is scheduled from April 23, 2018 to July 2, 2018 for the renovation in the cleanroom. The phase 2 renovation will majorly focus on the Lithoroom, expension and assembely room as well as the brand new gas distribution and monitoring system. We must move out all the storage racks and cabinets in the cleanroom and relocate quite a few equipment in the lab.  Thus, we have to ask all our users to help

1. Take out all your storage box, mask set or other belongings in the cleanroom

2. For the chemicals belong to individual researcher or research group, 

                a. if you are not going to use these chemicals during the shutdown, just leave them there, we will work with waste management to store them in a proper place.

                b. if you will need these chemicals in your own lab at McGill or other facilities, please find a proper way to transport and store the chemicals 

3. For the chemicals belong to Nanotools, we will be responsible for the relocation and storage. However, if you need these chemicals for your research in McGill or other facility outside McGill, please let us know type and quantity/volume needed asap, we will try our best to meet your requirement and arrange the transportation to your lab or other facility (if they agree to accept the chemical). The cost involved will be based on the quantity asked, our purchasing price, and the shipping cost.

Please note the following deadline:

1. April 13, 2018: send us the chemical needed, type, volume, shipping address if outside McGill

2. April 20 , 2018: move out all your masks, storage box, wafer box, or other belongings.  

We understand that the shutdown may have significant impact on your research or study, we will try our best to minimize the challenge and make this transitional period short and smooth. The phase one renovation was completed on time, hopefully it will happen for phase 2. We are expecting to resume all of the services in the middle of July, will keep you posted on the progress of the renovation 

Again, we are sorry for any inconvenient induced by the shutdown. If you have any suggestion, comments or concerns, don’t hesitate to contact us.

looking forward to your kind collaboration

Microfab Team

26 Mar 2018 Facilities Holiday reminder: Friday March 30 to Monday April 2

Dear Microfab Users, 

Just a friendly reminder that cleanroom will be closed from Friday, March 30 to Monday, April 2 inclusive. 

Wish all of you have a great holiday!

Microfab Team

20 Mar 2018 Facilities DI water shutdown: 6-8am, Monday, March 26

Dear microfab users, 

we got an inquriy asking for shutdown the DI water system on next Monday Morning, from 6am to 8am. It shouidn't affect our normal operation, but we will suggest you to only use the wet benches after 9am. 

Thanks for your understanding and collaboration. 

Microfab Team

19 Mar 2018 Lab The fab is open now

Dear Fab users,

The fab is open now, except for few equipments, such as BJD1800, which will take longer time to restart. please check the tool status when you make reservation.

 

Thanks

Microfab

11 Mar 2018 Lab Cleanroom shutdown: March 16 at 2pm to March 19 at 11am

Dear Microfab users, 

We were informed that there will be power shutdown in the building from March 17 to March 18. The cleanroom has to be closed from Friday afternoon 2pm, March 16 to Monday morning 11am, March 19. 

Sorry for the inconvenience. 

 

Microfab

9 Mar 2018 Lab Fab open now after yesterday's power outage

Dear Fab users,

Now the fab is re-open after yesterday's power outage.  Most of equipments are online, except for RIE and BJD1800, it will take much longer time to start up and get ready.

Thanks and let us know if questions.

Microfab team.

 

5 Mar 2018 Facilities Cleanroom opening from 9am March 6. Welcome Back!

Dear Microfab users, 

The phase 1 renovation is now officially completed. The cleanroom will open for service from tomorrow morning at 9am. Please note that the wet benches have been relocated, please contact staff for instructions if you are going to use them 

1. All the equipment in the Litho/yellow room should be up running. 

2. In the Etch/Wet room, Chamber A of RIE is on line

3. The solvent bench will not be ready until next Monday, if you need to use solvent, plesae use the litho bench in the yellow room at the moment, 

4. Nexdep, Nanoplas, Verteq and Denton should be ready by noon tomorrow

5. RTA, BJD currently have no power, the facility is looking into the issue right now, should be ready in next couple of days

6. All the characterization instruments should be ready by the end of tomorrow.

The following equipment will keep shutdown until the whole renovation complete, which is scheduled in the mid of July.

 PECVD, Furnace, ALD, DRIE, Chamber B, C on RIE and CPD

When you come to the lab, if you find any deffficence, such as strong smell, leakage of water or gas, nonfunctional equipment, please report to lab staff immediately. Highly appreciated your cooperation!

Finally, I will remind all the users to review the lab policy and follow the safety regulations in the cleanroom. Anything you are not so sure or forget, don't hesitate to contact staff for answers or re-training. 

Again, thanks for your patience and welcome back to the cleanroom.

 

Microfab Team

27 Feb 2018 Facilities cleanroom opening, postpone to March 6 (now confirmed)

Dear Patient Microfab users, 

Due to the delay of the final touching of the construction and availability of related authorities (approval of safety and health measures), the lab open has to be postponed to next Tuesday, March 6th based on current progress. 

Highly appreciated your understanding and patience. 

Looking forward to seeing you next week. 

Microfab Team

21 Feb 2018 Facilities Cleanroom reopening: Tentatively on March 1st

Dear Microfab users, 

I am glad to let you know that the renovation at Nanotools, phase 1, is close to finish on time, thanks to the hardwork of McGill Facility, exernal contractors, fab team and collaborative users as you. By the end of this week, all the major contruction for Phase 1 will be completed. Cleanroom staff will begin to recommission the equipment and test their functionalities from next week. We are expecting to at least partically open the lab for service on March 1st,  if everything is on the right track. the sequency of access to equipment will be: Wet bench, Litho, nexdep, denton, BJD, RIE, ALD. 

Please note that PECVD and Furnace will have to keep shutdown until the end of Phase 2 due to the safety regulations. 

We are looking forward to seeing you in the lab! Any questions, concerns, don't hesitate to contact us.

Microfab Team

17 Jan 2018 Mira3 EBL: using the log book on the table please

Dear EBL user, 

The interlock for EBL is mal-functional. please use the log book on the table to record your usage. 

Thanks for your collaboration. 

Microfab

17 Jan 2018 Mira3 EBL: using the log book on the table please

Dear EBL user, 

The interlock for EBL is mal-functional. please use the log book on the table to record your usage. 

Thanks for your collaboration. 

Microfab

8 Jan 2018 Facilities backup air compressor not working: some instrument might not functional. the cleanroom shutdown at 5pm today

Dear Microfab users, 

We found this morning that the backup air compressor didn't work properly. We have to shut it down to prevent damage. Since both main and backup air compressors are not functional, all the machine needs pneumatic control won't work, such as Nexdep, RTA, and Denton.  We know today is the last day before the major shutdown, we are very sorry for the inconvenience caused by this incident. 

Warm Regards

Microfab

21 Dec 2017 Mira3 Do not use NanoFrazor Computer

Hi All,

Please, dfo not use the computer for the NanoFrazor tool sitting in the same room where Mira3 is. The USB ports for this computer have never worked properly, and if you use them, you can create unexpected problems with the tool. Please, just stay away from that computer for now.

Thanks

Sasa

21 Dec 2017 Lab Cleanroom open time in Jan 2018: Jan 4 in the afternoon to end of Jan 8, no access from Jan 9 to Feb 26

Dear Microfab users, 

Just informed by McGill EHS, McGill staff from waste management will come to pick up all the chemicals in the cleanroom on Jan 10. Meanwhile, a contracted mover will come to move furniture and equipment to a storage place on Jan 9.

We will have to close the whole cleanroom from Jan 9 to accommodate this schedule. Please come to pick up all your belongings, including storage boxes, samples, wafers, etc by the end of Jan 8. Although the cleanroom will be reopened on Jan 4, we won't suggest you do any fabrication job from Jan 4 to Jan 8, considering the potential heavy traffic caused by the preparation of renovation and moving. If you do need to use the equipment, please let us know which one and how long you will need them. 

Again, thank you for your collaboration and wish you a wonderful holiday. 

Microfab Team

19 Dec 2017 Lab Urgent: if you could, please remove all personal belongings, box, samples in the cleanroom before Friday at noon, Dec 22

Dear Microfab users, 

This is a kind reminder for all the Nanotools users. If you are not planning to work in the cleanroom from Jan 5 to Jan 12, please take out all your belongings from the cleanroom before the Christmas shutdown starting this Friday at noon, Dec 22. The lab staff will work with McGill waste management, moving company to package and transport the stuff in the gowning room, corridors and white room (etch/dep) in the week of Jan 8 for the preparation of the renovation. From Jan 12, for all the unclaimed stuff left in the cleanroom, we will either dispose them or store in a temporary place, which will not be a cleanroom with temp and humidity control. The cleanroom holds no responsibilities for the damage caused. When the samples, boxes or chemicals have been put into the storage place, we won't be able to retrieve the samples of chemicals for a specific group/user during the shutdown time.

If you have any questions and concerns, please let us know by the end of Wednesday, Dec 20.

Looking forward to your collaboration

Microfab

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