Lab Updates
Tools Problems and Shutdowns
| Problem | 28 Aug | wb-si-etch | rinser not operational | sristic |
| Problem | 04 Dec | am5000 | NF3, HBr, He/O2 mixture not available | pyang |
| Problem | 24 Feb | am5000 | Cassete shuttle doesn't work | pyang |
| Problem | 03 Jun | Verteq | Machine doesn't run recipe | pyang |
| Problem | 24 Aug | dad3240 | The slide door at spindle side not able to open | johnli |
| Shutdown | 19 Jan | tylannitride | dcs mfc issue | dberry |
| Shutdown | 08 Jan | mrc603 | machine needs to go to the OR | dberry |
| Shutdown | 29 Apr | sitecoat | Shut down for station 1 and 2 not working | johnli |
| Shutdown | 08 Jun | sde110 | Service visit | leugene |
| Shutdown | 14 Sep | tylanpoly | Poly pump makes nosie | pyang |
| Shutdown | 16 Nov | tylanox | Tool shut down | pyang |
| Shutdown | 16 Nov | tylanox2 | Tool shut down | pyang |
| Shutdown | 06 Mar | cpd | down for renovation | sristic |
| Shutdown | 18 Apr | dilase650 | shutdown for relocation | johnli |
| Shutdown | 18 Apr | evg101 | shutdown for relocation | johnli |
| Shutdown | 16 Oct | laurell-develop | The tool is not available at the moment | johnli |
Metal Deposition Target/Crucible Status
| Comment | 22 Jun 2020 | nexdep | Material: Al Cu Ti Cr Ni Au | mc |
| Comment | 04 Sep 2020 | bjd1800 | Material: Ti Au Al Ni Ag Cr | mc |
| Comment | 04 Sep 2020 | dentone14 | Material: RF (cathode 1)- ITO, DC1 (cathode 2)- Au, DC2(cathode 3)- NiCr | zlu |
| Comment | 19 Mar 2014 | mrc603 | Material: Cr SiC Al | mnannini |
| Comment | 12 Aug 2019 | dad3240 | Blade:Glass_200 um | pyang |
Users in the lab
| Name | Since | Time |
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Equipment in use
| item | time | member |
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