Tools Problems and Shutdowns

Problem 01 Feb am5000 Ammonia not available for Si3N4 deposition pyang
Problem 01 Feb am5000 Chamber D only available 9AM-4PM pyang
Problem 24 Mar evg501 the mechanical pump has some noise johnli
Problem 19 Jun am5000 Chamber cannot reach 400C pyang
Problem 22 Jun xef2 unload-load sample byaghootkar
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 23 Jan evg101 No power into PC and ultra nozzle lourqian
Shutdown 04 Apr dsb6000 preassure not going below 2Torr sristic
Shutdown 22 Jun gemstar8_ald Cool down for removing TDMAT canister johnli

Metal Deposition Target/Crucible Status

Comment 22 Jul 2016 nexdep Material: Al Pd Ti Cr Ni Au johnli
Comment 14 Jun 2017 bjd1800 Material: Ti Au Al Ni Cr Ge amesgar
Comment 01 Jun 2017 dentone14 Material: RF (cathode 1)- ITO, DC1 (cathode 2)- In, DC2(cathode 3)- Cr amesgar
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 25 May 2017 dad3240 Blade: Glass 200um rwang
For more data click on the tool name

Users in the lab

Name Since Time

Equipment in use

item time member
mira 2017-06-22 13:18:32 rrashid

Today's Reservations

mira 06:30:00 14:00:00 rrashid
am5000 09:00:00 11:00:00 yra
laurell 10:30:00 11:30:00 rrashid
laurell 12:30:00 14:00:00 rrashid
mira 14:00:00 22:00:00 yra

Tomorrow's Reservations