Tools Problems and Shutdowns

Problem 01 Feb am5000 Ammonia not available for Si3N4 deposition pyang
Problem 01 Feb am5000 Chamber D only available 9AM-4PM pyang
Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 10 Oct nanospec seems lamp got burned zlu
Problem 11 Oct wb-si-etch timer is out of battery hle
Problem 13 Oct vega_sem nitrogen purge problem sristic
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 11 Oct dsb6000 not pumping sristic
Shutdown 11 Oct nanospec lamp needs to be replaced zlu

Metal Deposition Target/Crucible Status

Comment 22 Jul 2016 nexdep Material: Al Pd Ti Cr Ni Au johnli
Comment 18 Oct 2017 bjd1800 Material: Ti Au Al Ni Cr Ag amesgar
Comment 10 Oct 2017 dentone14 Material: RF (cathode 1)- SiO2, DC1 (cathode 2)- Au, DC2(cathode 3)- Cu zlu
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 16 Oct 2017 dad3240 Blade: Glass 200um radintahvildari
For more data click on the tool name

Users in the lab

Name Since Time
Alireza Hajhosseini Mesgar 2017-10-18 13:09:53 08:46:09

Equipment in use

item time member
parylene 2017-10-18 08:35:37 sristic

Today's Reservations

Tomorrow's Reservations

am5000 08:30:00 09:30:00 akamanzi
evg620 09:00:00 10:00:00 xcapaldi
laurell 09:00:00 10:30:00 xcapaldi
wb-si-etch 09:00:00 17:00:00 xcapaldi
wbsolvent 09:10:00 11:00:00 rrashid
evg620 10:00:00 11:00:00 xcapaldi
gemstar8_ald 10:00:00 17:00:00 nhungth
lithosolv 10:00:00 10:30:00 jxu
laurell 10:30:00 11:30:00 jxu
am5000 11:00:00 12:45:00 xcapaldi
evg620 11:00:00 11:30:00 pmodarres
dentone14 11:30:00 13:00:00 zlu
evg620 11:30:00 12:30:00 pmodarres
laurell 11:30:00 12:30:00 nhungth
evg620 12:30:00 13:30:00 jxu
laurell 12:30:00 14:00:00 yra
bjd1800 13:00:00 14:30:00 sadaff
evg620 13:30:00 14:30:00 jxu
am5000 14:00:00 15:00:00 rwang
laurell 14:00:00 15:00:00 radintahvildari
bjd1800 14:30:00 15:30:00 sadaff
lithosolv 14:30:00 15:00:00 jxu
evg620 15:00:00 16:00:00 radintahvildari
lithosolv 15:00:00 15:10:00 jxu
wbgen-hf 15:00:00 16:00:00 nliu
bjd1800 15:30:00 17:30:00 nhungth
am5000 16:00:00 17:00:00 nhungth
laurell 16:00:00 17:00:00 nhungth
wbgen-nonhf 16:00:00 17:00:00 nliu
wbsolvent 16:10:00 19:10:00 rrashid
laurell 17:00:00 18:30:00 yra
bjd1800 17:30:00 20:00:00 s_firouz
dentone14 18:30:00 21:00:00 rrashid
bjd1800 20:00:00 21:00:00 rrashid