Tools Problems and Shutdowns

Problem 01 Feb am5000 Ammonia not available for Si3N4 deposition pyang
Problem 01 Feb am5000 Chamber D only available 9AM-4PM pyang
Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 01 Dec nexdep Interlock Problem amesgar
Problem 22 Dec copco1 Master compressor has oil leak johnli
Problem 22 Dec dentone14 contamination s_firouz
Problem 16 Jan mira cannot enable the Mira from coral rwang
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 16 Nov tylanox Tool shut down pyang
Shutdown 16 Nov tylanox2 Tool shut down pyang
Shutdown 22 Dec am5000 Tool shutdown for renovation pyang
Shutdown 22 Dec bjd1800 shutdown for the holiday period amesgar

Metal Deposition Target/Crucible Status

Comment 13 Nov 2017 nexdep Material: Al Pt Ti Ge Ni Au amesgar
Comment 05 Dec 2017 bjd1800 Material: Ti Au Al Ni Cr Ag amesgar
Comment 21 Dec 2017 dentone14 Material: RF (cathode 1)- ZnO, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr zlu
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 07 Dec 2017 dad3240 Blade: Glass 200um johnli
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