Tools Problems and Shutdowns

Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 24 Feb am5000 Cassete shuttle doesn't work pyang
Problem 03 Jun Verteq Machine doesn't run recipe pyang
Problem 24 Mar mira air pressure for pneumatic is low johnli
Problem 16 Apr am5000 N2O valve malfunction pyang
Problem 21 Apr am5000 NF3 not available pyang
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 16 Nov tylanox Tool shut down pyang
Shutdown 16 Nov tylanox2 Tool shut down pyang
Shutdown 06 Mar cpd down for renovation sristic
Shutdown 18 Apr dilase650 shutdown for relocation johnli
Shutdown 18 Apr evg101 shutdown for relocation johnli
Shutdown 16 Oct laurell-develop The tool is not available at the moment johnli
Shutdown 14 Oct sde110 shutdown pyang

Metal Deposition Target/Crucible Status

Comment 22 Jun 2020 nexdep Material: Al Cu Ti Cr Ni Au mc
Comment 16 Sep 2021 bjd1800 Material: Ti Au Al Ni ZnO Cr johnli
Comment 15 Jun 2021 dentone14 Material: Rf-ITO,DC1-Au,DC2-Ti zlu
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 15 Sep 2021 dad3240 Blade:Glass-200um johnli
For more data click on the tool name

Users in the lab

Name Since Time

Equipment in use

item time member

Today's Reservations

evg620 08:00:00 09:00:00 syedire
laurell 08:00:00 08:30:00 syedire
lithosolv 08:00:00 08:45:00 syin
laurell 08:30:00 09:30:00 syin
lithosolv 08:45:00 09:30:00 syedire
am5000 09:00:00 09:15:00 hparimoo
evg620 09:00:00 10:00:00 syin
lithosolv 09:30:00 10:00:00 syin
am5000 10:00:00 13:00:00 htran
ambios 10:00:00 11:00:00 syin
dentone14 10:00:00 11:30:00 zlu
evg620 10:00:00 10:30:00 Tamer
laurell 10:00:00 10:30:00 Tamer
lithosolv 10:00:00 10:30:00 Tamer
mira 10:00:00 16:30:00 htran
nexdep 10:00:00 10:30:00 syin
wbsolvent 10:00:00 10:30:00 davidcheung1030
bjd1800 10:30:00 15:30:00 Tamer
evg620 10:30:00 11:30:00 SeanRomanuik
laurell 10:30:00 11:30:00 SeanRomanuik
lithosolv 10:30:00 13:00:00 SeanRomanuik
nexdep 10:30:00 12:30:00 syin
Oven 10:30:00 13:00:00 SeanRomanuik
wbgen-hf 10:30:00 11:00:00 davidcheung1030
wbsolvent 11:00:00 11:30:00 syin
evg620 11:30:00 12:30:00 SeanRomanuik
laurell 11:30:00 13:00:00 SeanRomanuik
wbsolvent 11:30:00 13:00:00 syin
dentone14 12:30:00 14:30:00 msalehi
evg620 12:30:00 13:00:00 SeanRomanuik
nexdep 12:30:00 14:30:00 msalehi
am5000 13:00:00 15:00:00 htran
laurell 13:00:00 13:30:00 hparimoo
lithosolv 13:00:00 13:15:00 hparimoo
evg620 13:30:00 14:00:00 hparimoo
evg620 14:00:00 14:30:00 hparimoo
wbgen-nonhf 14:00:00 15:00:00 ypatel
wbsolvent 14:00:00 14:30:00 hparimoo
evg620 14:30:00 15:00:00 hparimoo
nexdep 14:30:00 17:00:00 ypatel
wbsolvent 14:30:00 16:30:00 hparimoo
lithosolv 14:45:00 15:15:00 hparimoo
am5000 15:00:00 16:00:00 ypatel
wbgen-hf 15:00:00 15:30:00 hparimoo
am5000 16:00:00 16:45:00 ypatel
JetFirst200 16:00:00 17:00:00 ypatel

Tomorrow's Reservations

wbsolvent 08:00:00 13:00:00 gsuwito
laurell 09:00:00 09:30:00 hparimoo
lithosolv 09:00:00 09:15:00 hparimoo
wbgen-nonhf 09:00:00 10:30:00 xcapaldi
wb-si-etch 09:00:00 11:00:00 davidcheung1030
evg620 09:30:00 10:30:00 hparimoo
am5000 10:00:00 12:00:00 pyang
mira 10:00:00 13:00:00 htran
evg501 10:30:00 17:00:00 xcapaldi
evg620 10:30:00 11:00:00 hparimoo
lithosolv 11:00:00 11:15:00 hparimoo
wbgen-nonhf 11:00:00 12:00:00 hparimoo
evg620 11:30:00 12:30:00 SeanRomanuik
laurell 11:30:00 12:30:00 SeanRomanuik
lithosolv 11:30:00 14:00:00 SeanRomanuik
nexdep 11:30:00 13:00:00 hparimoo
Oven 11:30:00 14:00:00 SeanRomanuik
evg620 12:30:00 13:30:00 SeanRomanuik
laurell 12:30:00 14:00:00 SeanRomanuik
mira 13:00:00 16:30:00 htran
wbsolvent 13:00:00 16:00:00 htran
evg620 13:30:00 14:00:00 SeanRomanuik
am5000 14:15:00 15:45:00 ypatel
wbgen-nonhf 15:00:00 16:30:00 htran