Tools Problems and Shutdowns

Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 10 Sep vega_sem wifi connection not working hle
Problem 11 Sep am5000 Chamber D CF4 MFC not responses well pyang
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 16 Nov tylanox Tool shut down pyang
Shutdown 16 Nov tylanox2 Tool shut down pyang
Shutdown 06 Mar cpd down for renovation sristic
Shutdown 18 Apr dilase650 shutdown for relocation johnli
Shutdown 18 Apr evg101 shutdown for relocation johnli
Shutdown 16 Oct laurell-develop The tool is not available at the moment johnli
Shutdown 08 Aug dentone14 cathode water low alarm zlu

Metal Deposition Target/Crucible Status

Comment 11 Sep 2019 nexdep Material: Al Cu Ti Cr Ni Au mc
Comment 10 Sep 2019 bjd1800 Material: ZnO Au Al Ni Ag Cr mc
Comment 08 Jul 2019 dentone14 Material: RF (cathode 1)- TiO2, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr mc
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 12 Aug 2019 dad3240 Blade:Glass_200 um pyang
For more data click on the tool name

Users in the lab

Name Since Time

Equipment in use

item time member

Today's Reservations

Tomorrow's Reservations

wbgen-nonhf 09:00:00 10:00:00 asolyom
laurell 10:00:00 11:00:00 asolyom
nexdep 10:30:00 12:30:00 asolyom