Lab Updates

Tools Problems and Shutdowns

Problem 01 Feb am5000 Ammonia not available for Si3N4 deposition pyang
Problem 01 Feb am5000 Chamber D only available 9AM-4PM pyang
Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 01 Dec nexdep Interlock Problem amesgar
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 16 Nov tylanox Tool shut down pyang
Shutdown 16 Nov tylanox2 Tool shut down pyang

Metal Deposition Target/Crucible Status

Comment 13 Nov 2017 nexdep Material: Al Pt Ti Ge Ni Au amesgar
Comment 05 Dec 2017 bjd1800 Material: Ti Au Al Ni Cr Ag amesgar
Comment 15 Dec 2017 dentone14 Material: RF (cathode 1)- ITO, DC1 (cathode 2)- In, DC2(cathode 3)- Cr sristic
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 07 Dec 2017 dad3240 Blade: Glass 200um johnli
For more data click on the tool name

Users in the lab

Name Since Time
Paresa Modarres 2017-12-18 10:42:33 00:51:19
Hong Nhung Tran 2017-12-18 10:27:46 01:06:06
Neng Liu 2017-12-18 10:22:55 01:10:57
Radin Tahvildari 2017-12-18 09:48:24 01:45:28
Annabelle Gascon 2017-12-18 08:46:45 02:47:07
Seyedamin Firouzeh 2017-12-18 08:27:14 03:06:38
Bahareh Yaghootkar 2017-12-18 08:08:13 03:25:39

Equipment in use

item time member
dsb6000 2017-12-18 08:17:08 byaghootkar
wbgen-hf 2017-12-18 09:33:41 byaghootkar
wbsolvent 2017-12-18 09:42:58 rrashid
wb-si-etch 2017-12-18 10:35:12 nhungth
yes 2017-12-18 10:36:15 scopesys
wbgen-nonhf 2017-12-18 10:36:49 nliu
evg620 2017-12-18 11:03:56 s_firouz
bjd1800 2017-12-18 11:19:57 rwang
am5000 2017-12-18 11:25:41 nhungth
laurell 2017-12-18 11:33:42 rrashid

Today's Reservations

am5000 11:45:00 13:30:00 s_firouz
evg620 12:00:00 13:00:00 s_firouz
laurell 12:00:00 13:00:00 pmodarres
wbsolvent 12:00:00 14:00:00 rwang
wbgen-hf 12:30:00 15:00:00 rwang
wbgen-nonhf 12:30:00 14:30:00 rwang
yes 12:30:00 13:30:00 pmodarres
bjd1800 13:00:00 13:30:00 nhungth
evg620 13:00:00 14:00:00 pmodarres
laurell 13:00:00 13:30:00 rwang
am5000 13:30:00 14:00:00 nhungth
bjd1800 13:30:00 17:00:00 s_firouz
laurell 13:30:00 14:30:00 nhungth
am5000 14:00:00 14:45:00 nhungth
dsb6000 14:00:00 17:30:00 byaghootkar
evg620 14:00:00 14:30:00 pmodarres
wbsolvent 14:00:00 14:40:00 rwang
evg620 14:30:00 15:30:00 s_firouz
laurell 14:30:00 17:00:00 pmodarres
am5000 14:45:00 15:15:00 nliu
am5000 15:15:00 16:30:00 rwang
evg620 15:30:00 16:30:00 pmodarres
am5000 16:30:00 17:15:00 scopesys
nexdep 16:30:00 18:00:00 rwang
bjd1800 17:00:00 19:00:00 nhungth
evg620 17:00:00 18:00:00 s_firouz
laurell 17:00:00 17:30:00 pmodarres
am5000 17:15:00 17:30:00 scopesys
gemstar8_ald 17:30:00 20:30:00 s_firouz
laurell 17:30:00 18:30:00 rwang
evg620 18:00:00 19:00:00 s_firouz
laurell 18:30:00 19:30:00 nhungth
mira 18:30:00 00:00:00 rrashid
bjd1800 19:00:00 20:30:00 s_firouz
evg620 19:30:00 20:30:00 rwang
evg620 20:30:00 21:00:00 rwang

Tomorrow's Reservations

mira 07:30:00 09:00:00 yra
bjd1800 08:00:00 09:30:00 rwang
evg620 08:00:00 08:30:00 rwang
laurell 08:00:00 09:00:00 akamanzi
evg620 08:30:00 09:30:00 rwang
am5000 08:45:00 09:30:00 scopesys
gemstar8_ald 09:00:00 13:00:00 zhuoranwang
laurell 09:00:00 10:00:00 rwang
mira 09:00:00 09:30:00 nhungth
wbgen-hf 09:00:00 11:00:00 rwang
wbsolvent 09:10:00 10:30:00 rwang
am5000 09:30:00 10:00:00 nhungth
evg620 09:30:00 10:30:00 s_firouz
mira 09:30:00 10:00:00 nhungth
parylene 09:30:00 14:30:00 annabellegascon
am5000 10:00:00 11:15:00 rrashid
laurell 10:00:00 10:30:00 nhungth
mira 10:00:00 13:30:00 nhungth
nexdep 10:00:00 11:30:00 rwang
evg620 10:30:00 11:30:00 s_firouz
laurell 10:30:00 11:00:00 nhungth
wb-si-etch 10:30:00 17:00:00 nhungth
wbsolvent 10:50:00 12:10:00 rwang
bjd1800 11:00:00 13:00:00 nhungth
laurell 11:00:00 11:30:00 nhungth
am5000 11:15:00 11:45:00 nhungth
evg620 11:30:00 12:30:00 ifakih
laurell 11:30:00 12:00:00 nhungth
nexdep 11:30:00 16:30:00 pghamari
am5000 11:45:00 13:30:00 s_firouz
laurell 12:00:00 13:00:00 rrashid
wbgen-hf 12:00:00 14:30:00 rwang
evg620 12:30:00 13:30:00 ifakih
bjd1800 13:00:00 14:00:00 rrashid
gemstar8_ald 13:00:00 17:30:00 pghamari
laurell 13:00:00 14:00:00 rwang
am5000 13:30:00 14:00:00 nhungth
evg620 13:30:00 14:00:00 rwang
mira 13:30:00 17:00:00 nhungth
am5000 14:00:00 14:45:00 nhungth
bjd1800 14:00:00 17:00:00 s_firouz
evg501 14:00:00 16:00:00 johnli
evg620 14:00:00 15:00:00 nhungth
laurell 14:00:00 15:00:00 scopesys
am5000 14:45:00 15:15:00 nliu
evg620 15:00:00 16:00:00 scopesys
laurell 15:00:00 16:00:00 nhungth
am5000 15:15:00 16:30:00 rwang
evg620 16:00:00 17:00:00 s_firouz
laurell 16:00:00 17:30:00 rrashid
am5000 16:30:00 17:30:00 s_firouz
nexdep 16:30:00 17:00:00 rwang
bjd1800 17:00:00 17:30:00 rrashid
evg620 17:00:00 18:00:00 s_firouz
mira 17:00:00 00:00:00 rrashid
nexdep 17:00:00 19:00:00 rwang
bjd1800 17:30:00 20:00:00 rrashid
gemstar8_ald 17:30:00 20:30:00 s_firouz
laurell 17:30:00 19:00:00 yra
evg620 18:00:00 19:00:00 rrashid
evg620 19:00:00 20:00:00 rrashid
bjd1800 20:00:00 21:30:00 rwang
evg620 20:00:00 21:00:00 rwang