Tools Problems and Shutdowns

Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 16 Apr ebara-p5000 Chamber C pump report over current failure and won't start pyang
Problem 11 Jul ambios Vertical calibration / units incorrect asolyom
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 16 Nov tylanox Tool shut down pyang
Shutdown 16 Nov tylanox2 Tool shut down pyang
Shutdown 05 Mar JetFirst200 need connect power cable zlu
Shutdown 06 Mar cpd down for renovation sristic
Shutdown 18 Apr dilase650 shutdown for relocation johnli
Shutdown 18 Apr evg101 shutdown for relocation johnli
Shutdown 27 Sep am5000 Tool offline until end of December pyang
Shutdown 16 Oct laurell-develop The tool is not available at the moment johnli

Metal Deposition Target/Crucible Status

Comment 22 Jan 2019 nexdep Material: Al Pt Ti Cr Ni Au amesgar
Comment 17 Jul 2019 bjd1800 Material: Ti Au Al Ni Ag Cr hle
Comment 08 Jul 2019 dentone14 Material: RF (cathode 1)- TiO2, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr mc
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 04 Jul 2019 dad3240 Blade:Silicon-250 um johnli
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