Tools Problems and Shutdowns

Problem 01 Feb am5000 Ammonia not available for Si3N4 deposition pyang
Problem 01 Feb am5000 Chamber D only available 9AM-4PM pyang
Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 13 Oct vega_sem nitrogen purge problem sristic
Problem 16 Nov am5000 Only Chamber A available on Nov 16th. pyang
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 30 Oct evg501 quartz and granphite plate damaged johnli
Shutdown 16 Nov tylanox Tool shut down pyang
Shutdown 16 Nov tylanox2 Tool shut down pyang
Shutdown 16 Nov JetFirst200 Shut down pyang
Shutdown 17 Nov bjd1800 Turned off for the upcoming ventillation shutdown amesgar
Shutdown 17 Nov nexdep turned off for upcoming ventillation shutdown amesgar
Shutdown 17 Nov dad3240 Tool shut down pyang

Metal Deposition Target/Crucible Status

Comment 13 Nov 2017 nexdep Material: Al Pt Ti Ge Ni Au amesgar
Comment 26 Oct 2017 bjd1800 Material: Ti Au Al Ni Cr Ge amesgar
Comment 09 Nov 2017 dentone14 Material: RF (cathode 1)- ITO, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr zlu
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 14 Nov 2017 dad3240 Blade:Silicon-250 um johnli
For more data click on the tool name

Users in the lab

Name Since Time

Equipment in use

item time member

Today's Reservations

Tomorrow's Reservations

mira 09:00:00 17:00:00 sristic
wbsolvent 15:00:00 17:00:00 sristic