Lab Updates
Tools Problems and Shutdowns
| Problem | 01 Feb | am5000 | Ammonia not available for Si3N4 deposition | pyang |
| Problem | 01 Feb | am5000 | Chamber D only available 9AM-4PM | pyang |
| Problem | 28 Aug | wb-si-etch | rinser not operational | sristic |
| Problem | 22 Dec | dentone14 | contamination | s_firouz |
| Problem | 05 Mar | am5000 | Only Chamber A available from March to April 2018 | pyang |
| Problem | 14 Mar | Verteq | very small leak from the pipe in the back | sristic |
| Problem | 16 Apr | ebara-p5000 | Chamber C pump report over current failure and won't start | pyang |
| Problem | 17 Apr | laurell | Pressure is too low, cannot hold the wafer | hle |
| Problem | 17 Apr | nexdep | the vaccum can't reach, | rrashid |
| Problem | 18 Apr | am5000 | The monitor screen isn't on | scopesys |
| Problem | 19 Apr | nexdep | Nexdep Deposition | pbehera |
| Shutdown | 19 Jan | tylannitride | dcs mfc issue | dberry |
| Shutdown | 08 Jan | mrc603 | machine needs to go to the OR | dberry |
| Shutdown | 29 Apr | sitecoat | Shut down for station 1 and 2 not working | johnli |
| Shutdown | 08 Jun | sde110 | Service visit | leugene |
| Shutdown | 14 Sep | tylanpoly | Poly pump makes nosie | pyang |
| Shutdown | 16 Nov | tylanox | Tool shut down | pyang |
| Shutdown | 16 Nov | tylanox2 | Tool shut down | pyang |
| Shutdown | 05 Mar | probe | Tool removed due to renovation | pyang |
| Shutdown | 05 Mar | JetFirst200 | need connect power cable | zlu |
| Shutdown | 05 Mar | gemstar8_ald | need relocation after renovation | zlu |
| Shutdown | 06 Mar | cpd | down for renovation | sristic |
| Shutdown | 06 Mar | wyko | Tool is offline due to renovation | johnli |
| Shutdown | 13 Apr | dentone14 | turbo pump controller, LED panel is off | zlu |
| Shutdown | 17 Apr | evg501 | Shut down for moving | pyang |
| Shutdown | 18 Apr | dilase650 | shutdown for relocation | johnli |
| Shutdown | 18 Apr | evg101 | shutdown for relocation | johnli |
| Shutdown | 19 Apr | dsb6000 | pump not working | sristic |
| Shutdown | 19 Apr | bjd1800 | Shut down to prepare for moving | amesgar |
Metal Deposition Target/Crucible Status
| Comment | 05 Apr 2018 | nexdep | Material: Al Pd Ti Cr Ni Au | amesgar |
| Comment | 05 Dec 2017 | bjd1800 | Material: Ti Au Al Ni Cr Ag | amesgar |
| Comment | 12 Apr 2018 | dentone14 | Material: RF (cathode 1)- TiO2, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr | sristic |
| Comment | 19 Mar 2014 | mrc603 | Material: Cr SiC Al | mnannini |
| Comment | 27 Mar 2018 | dad3240 | Blade:Glass-200 um | scopesys |
Users in the lab
| Name | Since | Time |
|---|
Equipment in use
| item | time | member |
|---|
