Lab Updates

Microfab Lab Updates RSS

23 May 2019 - [Lab] Fab is re-open now
23 May 2019 - [Lab] Lab shut down 9-10:30AM May 23rd
22 May 2019 - [Facilities] cleanroom exhaust shutdown tomorrow from 7:30am to 10:30
21 May 2019 - [Lab] Welcome Mcolisi Dlamini join Nanotools Staff team
15 May 2019 - [Facilities] Power shutdown Preparation: cleanroom close at 4pm May 17

See all Lab Updates - New Post

Tools Problems and Shutdowns

Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 16 Apr ebara-p5000 Chamber C pump report over current failure and won't start pyang
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 16 Nov tylanox Tool shut down pyang
Shutdown 16 Nov tylanox2 Tool shut down pyang
Shutdown 05 Mar JetFirst200 need connect power cable zlu
Shutdown 06 Mar cpd down for renovation sristic
Shutdown 18 Apr dilase650 shutdown for relocation johnli
Shutdown 18 Apr evg101 shutdown for relocation johnli
Shutdown 27 Sep am5000 Tool offline until end of December pyang
Shutdown 16 Oct laurell-develop The tool is not available at the moment johnli

Metal Deposition Target/Crucible Status

Comment 22 Jan 2019 nexdep Material: Al Pt Ti Cr Ni Au amesgar
Comment 10 May 2019 bjd1800 Material: Ti Au Al Ni Ag Cr hle
Comment 15 May 2019 dentone14 Material: RF (cathode 1)- TiO2, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr zlu
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 10 Apr 2019 dad3240 Blade:Glass_200 um johnli
For more data click on the tool name

Users in the lab

Name Since Time

Equipment in use

item time member

Today's Reservations

Tomorrow's Reservations

dentone14 12:00:00 14:30:00 ryekani
bjd1800 13:00:00 16:00:00 pmodarres