Lab Updates
02 Sep 2021 -
[RIE]
RIE chamber C offline now and machine offline for maintenance on Tuesday Sept 7th
25 Aug 2021 -
[Microfab policies]
New Cleanroom Policy, booking, H&S, Operation time, effective from Aug 30 2021
Tools Problems and Shutdowns
| Problem | 28 Aug | wb-si-etch | rinser not operational | sristic |
| Problem | 24 Feb | am5000 | Cassete shuttle doesn't work | pyang |
| Problem | 03 Jun | Verteq | Machine doesn't run recipe | pyang |
| Problem | 24 Mar | mira | air pressure for pneumatic is low | johnli |
| Problem | 16 Apr | am5000 | N2O valve malfunction | pyang |
| Problem | 21 Apr | am5000 | NF3 not available | pyang |
| Shutdown | 19 Jan | tylannitride | dcs mfc issue | dberry |
| Shutdown | 08 Jan | mrc603 | machine needs to go to the OR | dberry |
| Shutdown | 29 Apr | sitecoat | Shut down for station 1 and 2 not working | johnli |
| Shutdown | 14 Sep | tylanpoly | Poly pump makes nosie | pyang |
| Shutdown | 16 Nov | tylanox | Tool shut down | pyang |
| Shutdown | 16 Nov | tylanox2 | Tool shut down | pyang |
| Shutdown | 06 Mar | cpd | down for renovation | sristic |
| Shutdown | 18 Apr | dilase650 | shutdown for relocation | johnli |
| Shutdown | 18 Apr | evg101 | shutdown for relocation | johnli |
| Shutdown | 16 Oct | laurell-develop | The tool is not available at the moment | johnli |
| Shutdown | 14 Oct | sde110 | shutdown | pyang |
Metal Deposition Target/Crucible Status
| Comment | 22 Jun 2020 | nexdep | Material: Al Cu Ti Cr Ni Au | mc |
| Comment | 16 Sep 2021 | bjd1800 | Material: Ti Au Al Ni ZnO Cr | johnli |
| Comment | 15 Jun 2021 | dentone14 | Material: Rf-ITO,DC1-Au,DC2-Ti | zlu |
| Comment | 19 Mar 2014 | mrc603 | Material: Cr SiC Al | mnannini |
| Comment | 15 Sep 2021 | dad3240 | Blade:Glass-200um | johnli |
Users in the lab
| Name | Since | Time |
|---|
Equipment in use
| item | time | member |
|---|
Today's Reservations
| evg620 | 08:00:00 | 09:00:00 | syedire |
| laurell | 08:00:00 | 08:30:00 | syedire |
| lithosolv | 08:00:00 | 08:45:00 | syin |
| laurell | 08:30:00 | 09:30:00 | syin |
| lithosolv | 08:45:00 | 09:30:00 | syedire |
| am5000 | 09:00:00 | 09:15:00 | hparimoo |
| evg620 | 09:00:00 | 10:00:00 | syin |
| lithosolv | 09:30:00 | 10:00:00 | syin |
| am5000 | 10:00:00 | 13:00:00 | htran |
| ambios | 10:00:00 | 11:00:00 | syin |
| dentone14 | 10:00:00 | 11:30:00 | zlu |
| evg620 | 10:00:00 | 10:30:00 | Tamer |
| laurell | 10:00:00 | 10:30:00 | Tamer |
| lithosolv | 10:00:00 | 10:30:00 | Tamer |
| mira | 10:00:00 | 16:30:00 | htran |
| nexdep | 10:00:00 | 10:30:00 | syin |
| wbsolvent | 10:00:00 | 10:30:00 | davidcheung1030 |
| bjd1800 | 10:30:00 | 15:30:00 | Tamer |
| evg620 | 10:30:00 | 11:30:00 | SeanRomanuik |
| laurell | 10:30:00 | 11:30:00 | SeanRomanuik |
| lithosolv | 10:30:00 | 13:00:00 | SeanRomanuik |
| nexdep | 10:30:00 | 12:30:00 | syin |
| Oven | 10:30:00 | 13:00:00 | SeanRomanuik |
| wbgen-hf | 10:30:00 | 11:00:00 | davidcheung1030 |
| wbsolvent | 11:00:00 | 11:30:00 | syin |
| evg620 | 11:30:00 | 12:30:00 | SeanRomanuik |
| laurell | 11:30:00 | 13:00:00 | SeanRomanuik |
| wbsolvent | 11:30:00 | 13:00:00 | syin |
| dentone14 | 12:30:00 | 14:30:00 | msalehi |
| evg620 | 12:30:00 | 13:00:00 | SeanRomanuik |
| nexdep | 12:30:00 | 14:30:00 | msalehi |
| am5000 | 13:00:00 | 15:00:00 | htran |
| laurell | 13:00:00 | 13:30:00 | hparimoo |
| lithosolv | 13:00:00 | 13:15:00 | hparimoo |
| evg620 | 13:30:00 | 14:00:00 | hparimoo |
| evg620 | 14:00:00 | 14:30:00 | hparimoo |
| wbgen-nonhf | 14:00:00 | 15:00:00 | ypatel |
| wbsolvent | 14:00:00 | 14:30:00 | hparimoo |
| evg620 | 14:30:00 | 15:00:00 | hparimoo |
| nexdep | 14:30:00 | 17:00:00 | ypatel |
| wbsolvent | 14:30:00 | 16:30:00 | hparimoo |
| lithosolv | 14:45:00 | 15:15:00 | hparimoo |
| am5000 | 15:00:00 | 16:00:00 | ypatel |
| wbgen-hf | 15:00:00 | 15:30:00 | hparimoo |
| am5000 | 16:00:00 | 16:45:00 | ypatel |
| JetFirst200 | 16:00:00 | 17:00:00 | ypatel |
Tomorrow's Reservations
| wbsolvent | 08:00:00 | 13:00:00 | gsuwito |
| laurell | 09:00:00 | 09:30:00 | hparimoo |
| lithosolv | 09:00:00 | 09:15:00 | hparimoo |
| wbgen-nonhf | 09:00:00 | 10:30:00 | xcapaldi |
| wb-si-etch | 09:00:00 | 11:00:00 | davidcheung1030 |
| evg620 | 09:30:00 | 10:30:00 | hparimoo |
| am5000 | 10:00:00 | 12:00:00 | pyang |
| mira | 10:00:00 | 13:00:00 | htran |
| evg501 | 10:30:00 | 17:00:00 | xcapaldi |
| evg620 | 10:30:00 | 11:00:00 | hparimoo |
| lithosolv | 11:00:00 | 11:15:00 | hparimoo |
| wbgen-nonhf | 11:00:00 | 12:00:00 | hparimoo |
| evg620 | 11:30:00 | 12:30:00 | SeanRomanuik |
| laurell | 11:30:00 | 12:30:00 | SeanRomanuik |
| lithosolv | 11:30:00 | 14:00:00 | SeanRomanuik |
| nexdep | 11:30:00 | 13:00:00 | hparimoo |
| Oven | 11:30:00 | 14:00:00 | SeanRomanuik |
| evg620 | 12:30:00 | 13:30:00 | SeanRomanuik |
| laurell | 12:30:00 | 14:00:00 | SeanRomanuik |
| mira | 13:00:00 | 16:30:00 | htran |
| wbsolvent | 13:00:00 | 16:00:00 | htran |
| evg620 | 13:30:00 | 14:00:00 | SeanRomanuik |
| am5000 | 14:15:00 | 15:45:00 | ypatel |
| wbgen-nonhf | 15:00:00 | 16:30:00 | htran |
