Tools Problems and Shutdowns

Problem 01 Feb am5000 Ammonia not available for Si3N4 deposition pyang
Problem 01 Feb am5000 Chamber D only available 9AM-4PM pyang
Problem 31 Jul bjd1800 The dopped pellet is still isndie the equipment amesgar
Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 19 Sep am5000 wafer stuck in RIE chamber A sadaff
Problem 20 Sep am5000 Chamber A offline. johnli
Problem 20 Sep am5000 cannot move the wafer nhungth
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 20 Sep am5000 shutdown for the movement issue johnli

Metal Deposition Target/Crucible Status

Comment 22 Jul 2016 nexdep Material: Al Pd Ti Cr Ni Au johnli
Comment 11 Sep 2017 bjd1800 Material: Ti Au Al Ni Ge SiO2 amesgar
Comment 06 Sep 2017 dentone14 Material: RF (cathode 1)- ZnO, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr zlu
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 19 Sep 2017 dad3240 Blade: Glass 200um johnli
For more data click on the tool name

Users in the lab

Name Since Time
Sharif Sadaf 2017-09-21 13:32:28 17:51:22

Equipment in use

item time member
wbsolvent 2017-09-21 17:59:27 rrashid

Today's Reservations

evg620 08:00:00 09:00:00 akamanzi
wbsolvent 08:30:00 10:00:00 rrashid
xef2 08:30:00 11:30:00 byaghootkar
evg620 09:00:00 10:00:00 zliu
laurell 09:00:00 11:00:00 xcapaldi
am5000 09:15:00 10:00:00 rrashid
dentone14 09:30:00 11:00:00 zlu
gemstar8_ald 09:30:00 14:00:00 zhuoranwang
am5000 10:00:00 12:00:00 pyang
evg620 10:00:00 11:00:00 zliu
bjd1800 11:00:00 13:00:00 psong
evg620 11:00:00 12:00:00 fstabile
laurell 11:00:00 12:00:00 nliu
mira 11:30:00 14:00:00 nhungth
am5000 12:00:00 12:45:00 nhungth
evg620 12:00:00 13:00:00 fstabile
laurell 12:00:00 13:00:00 fstabile
vega_sem 12:30:00 17:30:00 byaghootkar
wbsolvent 12:30:00 13:00:00 rwang
am5000 12:45:00 13:45:00 xcapaldi
bjd1800 13:00:00 15:00:00 nhungth
evg620 13:00:00 14:00:00 nliu
am5000 13:45:00 15:15:00 nhungth
evg620 14:00:00 15:00:00 nliu
laurell 14:00:00 15:30:00 mzalouk
mira 14:00:00 15:30:00 rwang
JetFirst200 14:30:00 16:00:00 rwang
evg620 15:00:00 16:00:00 xcapaldi
am5000 15:15:00 16:00:00 rrashid
laurell 15:30:00 16:30:00 nhungth
mira 15:30:00 18:00:00 nhungth
am5000 16:00:00 16:15:00 radintahvildari
evg620 16:00:00 17:00:00 xcapaldi
am5000 16:15:00 16:30:00 radintahvildari
am5000 16:30:00 16:45:00 radintahvildari
am5000 16:45:00 17:00:00 radintahvildari
am5000 17:00:00 18:00:00 akamanzi
bjd1800 17:00:00 19:00:00 nhungth
evg620 17:00:00 18:00:00 nhungth
evg620 18:30:00 19:30:00 s_firouz

Tomorrow's Reservations