Lab Updates

Microfab Lab Updates RSS

23 Aug 2017 - [PECVD] PECVD back online
22 Aug 2017 - [RIE] PECVD chamber D offline
16 Aug 2017 - [RIE] PM5000 back online
09 Aug 2017 - [RIE] PM5000 major PM Aug 15-16

Tools Problems and Shutdowns

Problem 01 Feb am5000 Ammonia not available for Si3N4 deposition pyang
Problem 01 Feb am5000 Chamber D only available 9AM-4PM pyang
Problem 10 Jul mira NPGS PCI card failed johnli
Problem 31 Jul bjd1800 The dopped pellet is still isndie the equipment amesgar
Problem 22 Aug wbsolvent waste is full hle
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 17 Aug mira offline for test johnli

Metal Deposition Target/Crucible Status

Comment 22 Jul 2016 nexdep Material: Al Pd Ti Cr Ni Au johnli
Comment 21 Aug 2017 bjd1800 Material: Ti Au Al Ni Cr SiO2 amesgar
Comment 22 Aug 2017 dentone14 Material: RF (cathode 1)- ITO, DC1 (cathode 2)- Au, DC2(cathode 3)- Al sristic
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 22 Aug 2017 dad3240 Blade: Glass 200um johnli
For more data click on the tool name

Users in the lab

Name Since Time
Xavier Capaldi 2017-08-23 15:17:33 00:21:33
Zezhou Liu 2017-08-23 15:17:29 00:21:37
HuyBinh Le 2017-08-23 15:02:15 00:36:51
Yong-Ho Ra 2017-08-23 12:42:59 02:56:07
Roksana Tonny Rashid 2017-08-23 10:13:06 05:26:00

Equipment in use

item time member
mira 2017-08-18 11:40:41 johnli
wbsolvent 2017-08-23 10:20:06 rrashid
wb-si-etch 2017-08-23 10:26:31 xcapaldi
laurell 2017-08-23 15:36:59 hle

Today's Reservations

bjd1800 16:30:00 19:30:00 yra
evg620 16:30:00 17:30:00 yra
evg620 17:30:00 18:00:00 yra

Tomorrow's Reservations

yes 08:30:00 09:00:00 byaghootkar
laurell 09:00:00 09:30:00 byaghootkar
evg620 09:30:00 10:00:00 byaghootkar
dentone14 10:30:00 12:30:00 rwang
evg620 10:30:00 11:30:00 byaghootkar
bjd1800 11:00:00 13:30:00 rwang
gemstar8_ald 11:00:00 16:30:00 yichenwang
yes 11:00:00 12:00:00 fstabile
laurell 11:30:00 12:30:00 fstabile
evg620 12:00:00 13:00:00 byaghootkar
evg620 13:00:00 13:30:00 fstabile
mira 13:00:00 00:00:00 yra
evg620 13:30:00 14:30:00 byaghootkar
evg620 14:30:00 15:30:00 fstabile
nexdep 14:30:00 17:30:00 hle
vega_sem 15:00:00 17:00:00 hle