Tools Problems and Shutdowns

Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 16 Apr ebara-p5000 Chamber C pump report over current failure and won't start pyang
Problem 29 Oct wbgen-hf HF Bench leakage found on drain pipe zlu
Problem 29 Oct wbgen-nonhf Bench leakage found on drain pipe zlu
Problem 07 Jan mira NPGS communication issue johnli
Problem 14 Jan nexdep Sensor needs to be changed hle
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 16 Nov tylanox Tool shut down pyang
Shutdown 16 Nov tylanox2 Tool shut down pyang
Shutdown 05 Mar JetFirst200 need connect power cable zlu
Shutdown 06 Mar cpd down for renovation sristic
Shutdown 06 Mar wyko Tool is offline due to renovation johnli
Shutdown 18 Apr dilase650 shutdown for relocation johnli
Shutdown 18 Apr evg101 shutdown for relocation johnli
Shutdown 27 Sep am5000 Tool offline until end of December pyang
Shutdown 15 Oct yes Wait for electrican pump connection johnli
Shutdown 16 Oct laurell-develop The tool is not available at the moment johnli
Shutdown 18 Oct polisher Tool removed from the lab pyang
Shutdown 03 Jan evg501 Wafer flow missing alarm johnli
Shutdown 03 Jan dentone14 cooling water presssure too low zlu

Metal Deposition Target/Crucible Status

Comment 29 Nov 2018 nexdep Material: Al Pd Ti Cr Ni Au amesgar
Comment 14 Dec 2018 bjd1800 Material: Ti XX Al Ni Ag Pt amesgar
Comment 12 Apr 2018 dentone14 Material: RF (cathode 1)- TiO2, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr sristic
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 28 Nov 2018 dad3240 Blade:Glass-200um johnli
For more data click on the tool name

Users in the lab

Name Since Time

Equipment in use

item time member

Today's Reservations

nexdep 13:30:00 16:30:00 amesgar

Tomorrow's Reservations