Lab Updates

Tools Problems and Shutdowns

Problem 01 Feb am5000 Ammonia not available for Si3N4 deposition pyang
Problem 01 Feb am5000 Chamber D only available 9AM-4PM pyang
Problem 24 Mar evg501 the mechanical pump has some noise johnli
Problem 28 Jun gemstar8_ald TiO2 deposition is not avaible johnli
Problem 10 Jul mira NPGS PCI card failed johnli
Problem 13 Jul bjd1800 A user has dropped a pellet inside equipment amesgar
Problem 20 Jul bjd1800 sensor is 48.05% hle
Problem 20 Jul bjd1800 Xtal has to be changed! amesgar
Problem 21 Jul dentone14 vacuum keeps at around 3 x10-5 torr, chamber leakage zlu
Problem 24 Jul am5000 Chamber D Over temperature!! byaghootkar
Problem 24 Jul am5000 Chamber D offline due to chiller issue pyang
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 06 Jul evg101 power supply unit off again johnli
Shutdown 12 Jul evg501 Chiller clogged pyang

Metal Deposition Target/Crucible Status

Comment 22 Jul 2016 nexdep Material: Al Pd Ti Cr Ni Au johnli
Comment 11 Jul 2017 bjd1800 Material: Ti Au Al Ni Cr Ag amesgar
Comment 11 Jul 2017 dentone14 Material: RF (cathode 1)- In, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr zlu
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 20 Jul 2017 dad3240 Blade: glass-200um radintahvildari
For more data click on the tool name

Users in the lab

Name Since Time

Equipment in use

item time member

Today's Reservations

yes 08:00:00 08:30:00 myelsayed
evg620 08:30:00 09:30:00 myelsayed
laurell 08:30:00 09:00:00 myelsayed
am5000 09:00:00 12:00:00 pyang
laurell 09:00:00 10:00:00 hle
lithosolv 09:00:00 09:30:00 myelsayed
wbgen-nonhf 09:00:00 10:00:00 xcapaldi
evg620 09:30:00 10:30:00 hle
mira 09:30:00 10:00:00 rwang
wb-si-etch 09:30:00 12:30:00 xcapaldi
laurell 10:00:00 10:30:00 hle
mira 10:00:00 14:00:00 krahbardar
evg620 10:30:00 11:00:00 ifakih
laurell 10:30:00 12:00:00 pmodarres
evg620 11:30:00 12:00:00 pmodarres
dentone14 12:00:00 15:00:00 yra
evg620 12:00:00 13:00:00 ifakih
bjd1800 13:00:00 14:00:00 sadaff
evg620 13:00:00 13:30:00 pmodarres
laurell 13:30:00 14:00:00 myelsayed
nexdep 13:30:00 14:30:00 ifakih
evg620 14:00:00 15:00:00 myelsayed
mira 14:00:00 19:30:00 agelle
nexdep 14:30:00 16:00:00 yuzhang
mira 19:30:00 00:00:00 yra

Tomorrow's Reservations

mira 00:00:00 08:30:00 yra
bjd1800 08:00:00 10:00:00 tmbkrist
mira 08:30:00 14:30:00 rwang
evg620 09:30:00 10:30:00 hle
wbsolvent 09:30:00 10:30:00 schu
bjd1800 10:00:00 13:00:00 hle
gemstar8_ald 10:00:00 12:00:00 zhuoranwang
laurell 10:00:00 11:30:00 schu
nexdep 10:00:00 13:30:00 hle
evg620 11:30:00 12:30:00 pmodarres
bjd1800 13:00:00 15:30:00 amesgar
evg620 13:30:00 14:30:00 hle
mira 14:30:00 17:30:00 agelle
bjd1800 15:30:00 18:30:00 hle
mira 17:30:00 00:00:00 yra