Lab Updates

Microfab Lab Updates RSS

20 Mar 2019 - [Denton E14] Denton sputter offline : computer problem
18 Mar 2019 - [Lab] Power shutdown: Tuesday, March 19, from 3:30pm to Wednesday March 20, 9am
07 Mar 2019 - [Wet benches] DI water shutdown postpone to March 15 from 8am to 10am
28 Feb 2019 - [Facilities] DI water shutdown Monday, March 11, 8am to 10am
26 Feb 2019 - [NexDep] NexDep is back online

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Tools Problems and Shutdowns

Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 16 Apr ebara-p5000 Chamber C pump report over current failure and won't start pyang
Problem 22 Mar wbsolvent Waste is full hle
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 16 Nov tylanox Tool shut down pyang
Shutdown 16 Nov tylanox2 Tool shut down pyang
Shutdown 05 Mar JetFirst200 need connect power cable zlu
Shutdown 06 Mar cpd down for renovation sristic
Shutdown 18 Apr dilase650 shutdown for relocation johnli
Shutdown 18 Apr evg101 shutdown for relocation johnli
Shutdown 27 Sep am5000 Tool offline until end of December pyang
Shutdown 16 Oct laurell-develop The tool is not available at the moment johnli
Shutdown 20 Mar yes The programme recipe lost johnli
Shutdown 20 Mar dentone14 main computer boot failure zlu

Metal Deposition Target/Crucible Status

Comment 22 Jan 2019 nexdep Material: Al Pt Ti Cr Ni Au amesgar
Comment 17 Jan 2019 bjd1800 Material: Ti Au Al Ni Ag Pt amesgar
Comment 15 Mar 2019 dentone14 Material: RF (cathode 1)- ZnO, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr zlu
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 06 Mar 2019 dad3240 Blade:Glass_200 um johnli
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