Lab Updates
16 Sep 2018 -
[Facilities]
Lab renovation update: reopening date shifted to Sept 24 (hopefully the last postpone)
Tools Problems and Shutdowns
| Problem | 01 Feb | am5000 | Ammonia not available for Si3N4 deposition | pyang |
| Problem | 01 Feb | am5000 | Chamber D only available 9AM-4PM | pyang |
| Problem | 28 Aug | wb-si-etch | rinser not operational | sristic |
| Problem | 22 Dec | dentone14 | contamination | s_firouz |
| Problem | 05 Mar | am5000 | Only Chamber A available from March to April 2018 | pyang |
| Problem | 16 Apr | ebara-p5000 | Chamber C pump report over current failure and won't start | pyang |
| Problem | 18 Apr | am5000 | The monitor screen isn't on | scopesys |
| Shutdown | 19 Jan | tylannitride | dcs mfc issue | dberry |
| Shutdown | 08 Jan | mrc603 | machine needs to go to the OR | dberry |
| Shutdown | 29 Apr | sitecoat | Shut down for station 1 and 2 not working | johnli |
| Shutdown | 08 Jun | sde110 | Service visit | leugene |
| Shutdown | 14 Sep | tylanpoly | Poly pump makes nosie | pyang |
| Shutdown | 16 Nov | tylanox | Tool shut down | pyang |
| Shutdown | 16 Nov | tylanox2 | Tool shut down | pyang |
| Shutdown | 05 Mar | probe | Tool removed due to renovation | pyang |
| Shutdown | 05 Mar | JetFirst200 | need connect power cable | zlu |
| Shutdown | 06 Mar | cpd | down for renovation | sristic |
| Shutdown | 06 Mar | wyko | Tool is offline due to renovation | johnli |
| Shutdown | 13 Apr | dentone14 | turbo pump controller, LED panel is off | zlu |
| Shutdown | 18 Apr | dilase650 | shutdown for relocation | johnli |
| Shutdown | 18 Apr | evg101 | shutdown for relocation | johnli |
| Shutdown | 27 Sep | am5000 | Tool offline until end of December | pyang |
| Shutdown | 15 Oct | yes | Wait for electrican pump connection | johnli |
| Shutdown | 16 Oct | laurell-develop | The tool is not available at the moment | johnli |
Metal Deposition Target/Crucible Status
| Comment | 05 Apr 2018 | nexdep | Material: Al Pd Ti Cr Ni Au | amesgar |
| Comment | 05 Dec 2017 | bjd1800 | Material: Ti Au Al Ni Cr Ag | amesgar |
| Comment | 12 Apr 2018 | dentone14 | Material: RF (cathode 1)- TiO2, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr | sristic |
| Comment | 19 Mar 2014 | mrc603 | Material: Cr SiC Al | mnannini |
| Comment | 27 Mar 2018 | dad3240 | Blade:Glass-200 um | scopesys |
Users in the lab
| Name | Since | Time |
|---|---|---|
| Alireza Hajhosseini Mesgar | 2018-10-17 11:29:24 | 00:23:45 |
Equipment in use
| item | time | member |
|---|
Today's Reservations
| bjd1800 | 14:00:00 | 17:00:00 | amesgar |
Tomorrow's Reservations
| wbsolvent | 09:00:00 | 09:30:00 | xcapaldi |
| laurell | 09:30:00 | 10:30:00 | xcapaldi |
| evg620 | 10:00:00 | 11:00:00 | xcapaldi |
| laurell | 10:30:00 | 11:30:00 | hle |
| lithosolv | 10:30:00 | 11:00:00 | xcapaldi |
| evg620 | 11:00:00 | 12:00:00 | hle |
| bjd1800 | 12:00:00 | 14:00:00 | kpotts |
| bjd1800 | 14:00:00 | 16:00:00 | hle |
