Lab Updates
Tools Problems and Shutdowns
| Problem | 28 Aug | wb-si-etch | rinser not operational | sristic |
| Problem | 16 Apr | ebara-p5000 | Chamber C pump report over current failure and won't start | pyang |
| Problem | 29 Oct | wbgen-hf | HF Bench leakage found on drain pipe | zlu |
| Problem | 29 Oct | wbgen-nonhf | Bench leakage found on drain pipe | zlu |
| Problem | 06 Dec | bjd1800 | Problem with changing crucibles. | ifakih |
| Shutdown | 19 Jan | tylannitride | dcs mfc issue | dberry |
| Shutdown | 08 Jan | mrc603 | machine needs to go to the OR | dberry |
| Shutdown | 29 Apr | sitecoat | Shut down for station 1 and 2 not working | johnli |
| Shutdown | 08 Jun | sde110 | Service visit | leugene |
| Shutdown | 14 Sep | tylanpoly | Poly pump makes nosie | pyang |
| Shutdown | 16 Nov | tylanox | Tool shut down | pyang |
| Shutdown | 16 Nov | tylanox2 | Tool shut down | pyang |
| Shutdown | 05 Mar | JetFirst200 | need connect power cable | zlu |
| Shutdown | 06 Mar | cpd | down for renovation | sristic |
| Shutdown | 06 Mar | wyko | Tool is offline due to renovation | johnli |
| Shutdown | 13 Apr | dentone14 | turbo pump controller, LED panel is off | zlu |
| Shutdown | 18 Apr | dilase650 | shutdown for relocation | johnli |
| Shutdown | 18 Apr | evg101 | shutdown for relocation | johnli |
| Shutdown | 27 Sep | am5000 | Tool offline until end of December | pyang |
| Shutdown | 15 Oct | yes | Wait for electrican pump connection | johnli |
| Shutdown | 16 Oct | laurell-develop | The tool is not available at the moment | johnli |
| Shutdown | 18 Oct | polisher | Tool removed from the lab | pyang |
| Shutdown | 21 Nov | vega_sem | can not pump down | johnli |
| Shutdown | 06 Dec | bjd1800 | carousel problem | amesgar |
Metal Deposition Target/Crucible Status
| Comment | 29 Nov 2018 | nexdep | Material: Al Pd Ti Cr Ni Au | amesgar |
| Comment | 26 Nov 2018 | bjd1800 | Material: Ti Au Al Ni Ag Pt | amesgar |
| Comment | 12 Apr 2018 | dentone14 | Material: RF (cathode 1)- TiO2, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr | sristic |
| Comment | 19 Mar 2014 | mrc603 | Material: Cr SiC Al | mnannini |
| Comment | 28 Nov 2018 | dad3240 | Blade:Glass-200um | johnli |
Users in the lab
| Name | Since | Time |
|---|
Equipment in use
| item | time | member |
|---|---|---|
| probe | 2018-12-10 11:24:24 | hle |
Today's Reservations
| wbgen-hf | 13:00:00 | 14:30:00 | amesgar |
| wbgen-nonhf | 13:00:00 | 14:30:00 | amesgar |
| dad3240 | 14:00:00 | 15:00:00 | johnli |
| laurell | 14:30:00 | 16:00:00 | dlaminim |
| dad3240 | 15:00:00 | 16:00:00 | johnli |
| evg620 | 15:00:00 | 16:00:00 | dlaminim |
