Tools Problems and Shutdowns

Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 04 Dec am5000 NF3, HBr, He/O2 mixture not available pyang
Problem 24 Feb am5000 Cassete shuttle doesn't work pyang
Problem 03 Jun Verteq Machine doesn't run recipe pyang
Problem 24 Aug dad3240 The slide door at spindle side not able to open johnli
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 16 Nov tylanox Tool shut down pyang
Shutdown 16 Nov tylanox2 Tool shut down pyang
Shutdown 06 Mar cpd down for renovation sristic
Shutdown 18 Apr dilase650 shutdown for relocation johnli
Shutdown 18 Apr evg101 shutdown for relocation johnli
Shutdown 16 Oct laurell-develop The tool is not available at the moment johnli

Metal Deposition Target/Crucible Status

Comment 22 Jun 2020 nexdep Material: Al Cu Ti Cr Ni Au mc
Comment 04 Sep 2020 bjd1800 Material: Ti Au Al Ni Ag Cr mc
Comment 04 Sep 2020 dentone14 Material: RF (cathode 1)- ITO, DC1 (cathode 2)- Au, DC2(cathode 3)- NiCr zlu
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 12 Aug 2019 dad3240 Blade:Glass_200 um pyang
For more data click on the tool name

Users in the lab

Name Since Time

Equipment in use

item time member

Today's Reservations

Tomorrow's Reservations