Tools Problems and Shutdowns

Problem 01 Feb am5000 Ammonia not available for Si3N4 deposition pyang
Problem 01 Feb am5000 Chamber D only available 9AM-4PM pyang
Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 22 Dec dentone14 contamination s_firouz
Problem 05 Mar am5000 Only Chamber A available from March to April 2018 pyang
Problem 14 Mar Verteq very small leak from the pipe in the back sristic
Problem 16 Apr ebara-p5000 Chamber C pump report over current failure and won't start pyang
Problem 17 Apr laurell Pressure is too low, cannot hold the wafer hle
Problem 17 Apr nexdep the vaccum can't reach, rrashid
Problem 18 Apr am5000 The monitor screen isn't on scopesys
Problem 19 Apr nexdep Nexdep Deposition pbehera
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 16 Nov tylanox Tool shut down pyang
Shutdown 16 Nov tylanox2 Tool shut down pyang
Shutdown 05 Mar probe Tool removed due to renovation pyang
Shutdown 05 Mar JetFirst200 need connect power cable zlu
Shutdown 05 Mar gemstar8_ald need relocation after renovation zlu
Shutdown 06 Mar cpd down for renovation sristic
Shutdown 06 Mar wyko Tool is offline due to renovation johnli
Shutdown 13 Apr dentone14 turbo pump controller, LED panel is off zlu
Shutdown 17 Apr evg501 Shut down for moving pyang
Shutdown 18 Apr dilase650 shutdown for relocation johnli
Shutdown 18 Apr evg101 shutdown for relocation johnli
Shutdown 19 Apr dsb6000 pump not working sristic
Shutdown 19 Apr bjd1800 Shut down to prepare for moving amesgar

Metal Deposition Target/Crucible Status

Comment 05 Apr 2018 nexdep Material: Al Pd Ti Cr Ni Au amesgar
Comment 05 Dec 2017 bjd1800 Material: Ti Au Al Ni Cr Ag amesgar
Comment 12 Apr 2018 dentone14 Material: RF (cathode 1)- TiO2, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr sristic
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 27 Mar 2018 dad3240 Blade:Glass-200 um scopesys
For more data click on the tool name

Users in the lab

Name Since Time

Equipment in use

item time member

Today's Reservations

Tomorrow's Reservations