Tools Problems and Shutdowns

Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 04 Dec am5000 NF3, HBr, He/O2 mixture not available pyang
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 16 Nov tylanox Tool shut down pyang
Shutdown 16 Nov tylanox2 Tool shut down pyang
Shutdown 06 Mar cpd down for renovation sristic
Shutdown 18 Apr dilase650 shutdown for relocation johnli
Shutdown 18 Apr evg101 shutdown for relocation johnli
Shutdown 16 Oct laurell-develop The tool is not available at the moment johnli

Metal Deposition Target/Crucible Status

Comment 11 Sep 2019 nexdep Material: Al Cu Ti Cr Ni Au mc
Comment 05 Dec 2019 bjd1800 Material: Ti Au Al Ni Ag Cr mc
Comment 03 Dec 2019 dentone14 Material: RF (cathode 1)- ITO, DC1 (cathode 2)- Au, DC2(cathode 3)- In zlu
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 12 Aug 2019 dad3240 Blade:Glass_200 um pyang
For more data click on the tool name

Users in the lab

Name Since Time
HuyBinh Le 2019-12-12 14:21:06 09:23:51

Equipment in use

item time member
wb-si-etch 2019-12-12 12:17:42 sbernard

Today's Reservations

Tomorrow's Reservations

wb-si-etch 09:00:00 12:30:00 sbernard
mira 10:00:00 15:00:00 maghayan
nexdep 10:00:00 14:30:00 maghayan
gemstar8_ald 10:30:00 13:00:00 fdauzou
wbgen-nonhf 12:00:00 12:30:00 sbernard
nexdep 14:30:00 17:00:00 maghayan
mira 15:00:00 17:30:00 hle