Lab Updates

Microfab Lab Updates RSS

07 Dec 2018 - [Facilities] Holiday shutdown: Dec 19, 5pm to Jan 3, 9am
04 Dec 2018 - [Facilities] After hour and Weekend/holiday access
29 Nov 2018 - [Mira3] Mira EBL status
29 Nov 2018 - [Vega3] Vega SEM status
28 Nov 2018 - [Lab] Compressed air back on line

Tools Problems and Shutdowns

Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 16 Apr ebara-p5000 Chamber C pump report over current failure and won't start pyang
Problem 29 Oct wbgen-hf HF Bench leakage found on drain pipe zlu
Problem 29 Oct wbgen-nonhf Bench leakage found on drain pipe zlu
Problem 06 Dec bjd1800 Problem with changing crucibles. ifakih
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 16 Nov tylanox Tool shut down pyang
Shutdown 16 Nov tylanox2 Tool shut down pyang
Shutdown 05 Mar JetFirst200 need connect power cable zlu
Shutdown 06 Mar cpd down for renovation sristic
Shutdown 06 Mar wyko Tool is offline due to renovation johnli
Shutdown 13 Apr dentone14 turbo pump controller, LED panel is off zlu
Shutdown 18 Apr dilase650 shutdown for relocation johnli
Shutdown 18 Apr evg101 shutdown for relocation johnli
Shutdown 27 Sep am5000 Tool offline until end of December pyang
Shutdown 15 Oct yes Wait for electrican pump connection johnli
Shutdown 16 Oct laurell-develop The tool is not available at the moment johnli
Shutdown 18 Oct polisher Tool removed from the lab pyang
Shutdown 21 Nov vega_sem can not pump down johnli
Shutdown 06 Dec bjd1800 carousel problem amesgar

Metal Deposition Target/Crucible Status

Comment 29 Nov 2018 nexdep Material: Al Pd Ti Cr Ni Au amesgar
Comment 26 Nov 2018 bjd1800 Material: Ti Au Al Ni Ag Pt amesgar
Comment 12 Apr 2018 dentone14 Material: RF (cathode 1)- TiO2, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr sristic
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 28 Nov 2018 dad3240 Blade:Glass-200um johnli
For more data click on the tool name

Users in the lab

Name Since Time

Equipment in use

item time member
probe 2018-12-10 11:24:24 hle

Today's Reservations

wbgen-hf 13:00:00 14:30:00 amesgar
wbgen-nonhf 13:00:00 14:30:00 amesgar
dad3240 14:00:00 15:00:00 johnli
laurell 14:30:00 16:00:00 dlaminim
dad3240 15:00:00 16:00:00 johnli
evg620 15:00:00 16:00:00 dlaminim

Tomorrow's Reservations