Lab Updates
Tools Problems and Shutdowns
Problem | 28 Aug | wb-si-etch | rinser not operational | sristic |
Problem | 04 Dec | am5000 | NF3, HBr, He/O2 mixture not available | pyang |
Shutdown | 19 Jan | tylannitride | dcs mfc issue | dberry |
Shutdown | 08 Jan | mrc603 | machine needs to go to the OR | dberry |
Shutdown | 29 Apr | sitecoat | Shut down for station 1 and 2 not working | johnli |
Shutdown | 08 Jun | sde110 | Service visit | leugene |
Shutdown | 14 Sep | tylanpoly | Poly pump makes nosie | pyang |
Shutdown | 16 Nov | tylanox | Tool shut down | pyang |
Shutdown | 16 Nov | tylanox2 | Tool shut down | pyang |
Shutdown | 06 Mar | cpd | down for renovation | sristic |
Shutdown | 18 Apr | dilase650 | shutdown for relocation | johnli |
Shutdown | 18 Apr | evg101 | shutdown for relocation | johnli |
Shutdown | 16 Oct | laurell-develop | The tool is not available at the moment | johnli |
Metal Deposition Target/Crucible Status
Comment | 11 Sep 2019 | nexdep | Material: Al Cu Ti Cr Ni Au | mc |
Comment | 05 Dec 2019 | bjd1800 | Material: Ti Au Al Ni Ag Cr | mc |
Comment | 03 Dec 2019 | dentone14 | Material: RF (cathode 1)- ITO, DC1 (cathode 2)- Au, DC2(cathode 3)- In | zlu |
Comment | 19 Mar 2014 | mrc603 | Material: Cr SiC Al | mnannini |
Comment | 12 Aug 2019 | dad3240 | Blade:Glass_200 um | pyang |
Users in the lab
Name | Since | Time |
---|---|---|
HuyBinh Le | 2019-12-12 14:21:06 | 09:23:51 |
Equipment in use
item | time | member |
---|---|---|
wb-si-etch | 2019-12-12 12:17:42 | sbernard |
Today's Reservations
Tomorrow's Reservations
wb-si-etch | 09:00:00 | 12:30:00 | sbernard |
mira | 10:00:00 | 15:00:00 | maghayan |
nexdep | 10:00:00 | 14:30:00 | maghayan |
gemstar8_ald | 10:30:00 | 13:00:00 | fdauzou |
wbgen-nonhf | 12:00:00 | 12:30:00 | sbernard |
nexdep | 14:30:00 | 17:00:00 | maghayan |
mira | 15:00:00 | 17:30:00 | hle |