Lab Updates

Microfab Lab Updates RSS

14 Nov 2018 - [Laurell coater] Spincoater Refresher Training-Friday Nov. 16-1PM
14 Nov 2018 - [Wet benches] HF and non-HF Wet bench refresher training
14 Nov 2018 - [NexDep] NexDep Refresher training
14 Nov 2018 - [BJD 1800] BJD Refresher training

Tools Problems and Shutdowns

Problem 01 Feb am5000 Ammonia not available for Si3N4 deposition pyang
Problem 01 Feb am5000 Chamber D only available 9AM-4PM pyang
Problem 28 Aug wb-si-etch rinser not operational sristic
Problem 22 Dec dentone14 contamination s_firouz
Problem 05 Mar am5000 Only Chamber A available from March to April 2018 pyang
Problem 16 Apr ebara-p5000 Chamber C pump report over current failure and won't start pyang
Problem 18 Apr am5000 The monitor screen isn't on scopesys
Problem 29 Oct wbgen-hf HF Bench leakage found on drain pipe zlu
Problem 29 Oct wbgen-nonhf Bench leakage found on drain pipe zlu
Shutdown 19 Jan tylannitride dcs mfc issue dberry
Shutdown 08 Jan mrc603 machine needs to go to the OR dberry
Shutdown 29 Apr sitecoat Shut down for station 1 and 2 not working johnli
Shutdown 08 Jun sde110 Service visit leugene
Shutdown 14 Sep tylanpoly Poly pump makes nosie pyang
Shutdown 14 Nov domestic-water City waterline shut down after building chiller installed. pyang
Shutdown 16 Nov tylanox Tool shut down pyang
Shutdown 16 Nov tylanox2 Tool shut down pyang
Shutdown 05 Mar JetFirst200 need connect power cable zlu
Shutdown 06 Mar cpd down for renovation sristic
Shutdown 06 Mar wyko Tool is offline due to renovation johnli
Shutdown 13 Apr dentone14 turbo pump controller, LED panel is off zlu
Shutdown 18 Apr dilase650 shutdown for relocation johnli
Shutdown 18 Apr evg101 shutdown for relocation johnli
Shutdown 27 Sep am5000 Tool offline until end of December pyang
Shutdown 15 Oct yes Wait for electrican pump connection johnli
Shutdown 16 Oct laurell-develop The tool is not available at the moment johnli
Shutdown 18 Oct polisher Tool removed from the lab pyang
Shutdown 08 Nov lithosolv Exhaust problem! amesgar

Metal Deposition Target/Crucible Status

Comment 05 Apr 2018 nexdep Material: Al Pd Ti Cr Ni Au amesgar
Comment 14 Nov 2018 bjd1800 Material: Ti Au Al Ni Cr Pt amesgar
Comment 12 Apr 2018 dentone14 Material: RF (cathode 1)- TiO2, DC1 (cathode 2)- Au, DC2(cathode 3)- Cr sristic
Comment 19 Mar 2014 mrc603 Material: Cr SiC Al mnannini
Comment 02 Nov 2018 dad3240 Blade:Glass-200um pyang
For more data click on the tool name

Users in the lab

Name Since Time
Oulin Yu 2018-11-15 14:40:02 16:10:20

Equipment in use

item time member

Today's Reservations

bjd1800 10:00:00 12:30:00 hle
wbgen-hf 10:00:00 12:00:00 amesgar
wbgen-nonhf 10:00:00 12:00:00 amesgar
laurell 13:00:00 13:30:00 amesgar
laurell 14:00:00 15:00:00 amesgar
evg620 15:00:00 16:00:00 amesgar

Tomorrow's Reservations