McGill Nanotools - Microfab

Lab Updates

Microfab Lab Updates

04 May 2021 - [Lab] MC is leaving Nanotools, last day May 6

07 Apr 2021 - [PECVD] PECVD back to service

12 Mar 2021 - [PECVD] PECVD offline

27 Jan 2021 - [Lab] cleanroom close on Feb 1st and 2nd due to drain pipe repair

10 Jan 2021 - [Lab] Nanotools open on Jan 11 as usual

Problem	28 Aug	wb-si-etch	rinser not operational	sristic
Problem	24 Feb	am5000	Cassete shuttle doesn't work	pyang
Problem	03 Jun	Verteq	Machine doesn't run recipe	pyang
Problem	24 Mar	mira	air pressure for pneumatic is low	johnli
Problem	16 Apr	am5000	N2O valve malfunction	pyang
Problem	21 Apr	am5000	NF3 not available	pyang
Shutdown	19 Jan	tylannitride	dcs mfc issue	dberry
Shutdown	08 Jan	mrc603	machine needs to go to the OR	dberry
Shutdown	29 Apr	sitecoat	Shut down for station 1 and 2 not working	johnli
Shutdown	14 Sep	tylanpoly	Poly pump makes nosie	pyang
Shutdown	16 Nov	tylanox	Tool shut down	pyang
Shutdown	16 Nov	tylanox2	Tool shut down	pyang
Shutdown	06 Mar	cpd	down for renovation	sristic
Shutdown	18 Apr	dilase650	shutdown for relocation	johnli
Shutdown	18 Apr	evg101	shutdown for relocation	johnli
Shutdown	16 Oct	laurell-develop	The tool is not available at the moment	johnli
Shutdown	14 Oct	sde110	shutdown	pyang

For more data click on the tool name

Name	Since	Time

item	time	member